Patents Assigned to ETS Gourdon
  • Patent number: 5034688
    Abstract: The invention concerns a temperature conditioning support for thermal tests on small objects such as semiconductor wafers incorporating integrated circuits. It consists of a platen and a hollow base. Inside the hollow cavity is contained a serpentine which can convey thermal fluid capable of heating and/or cooling the platen to achieve temperature regulation of the object placed on the platen, according to data supplied by a thermometric system that includes a temperature sensor associated to said support. The platen is made of electrically insulating and thermally conducting ceramic, the base being made of a material whose thermal expansion coefficient is substantially equal to that of the platen. A thin-film electrical resistance can be provided to ensure heating and, optionally, temperature measurement of the platen.
    Type: Grant
    Filed: April 28, 1989
    Date of Patent: July 23, 1991
    Assignee: ETS Gourdon
    Inventors: Daniel Moulene, Pierre Gourdon