Patents Assigned to Eulite Laboratories Inc.
  • Micromachined thermal flowmeter having heating element disposed in a silicon island
    Patent number: 6378365
    Abstract: A micromachined thermal flowmeter comprises characteristically at least one crystal silicon island jutted into the flow of a fluid to be determined which are embedded in an elastic low thermal conductivity layer supported by a rigid low thermal conductivity plate having a heating element and a pair of thermal sensing elements formed therein.
    Type: Grant
    Filed: November 30, 1999
    Date of Patent: April 30, 2002
    Assignee: Eulite Laboratories Inc.
    Inventor: Xiangzheng Tu