Patents Assigned to Excimer Laser Systems
  • Vacuum chuck
    Patent number: 6032997
    Abstract: A vacuum chuck having a body portion made of moldable glass or another suitable dielectric material including a top surface and bottom surface, a series of flat lands on the top surface of the body portion for supporting a wafer, and a series of orifices and vacuum lines for drawing a vacuum to secure the wafer in place on the lands of the body portion. A method of manufacturing such a vacuum chuck. A method of aligning a wafer on such a vacuum chuck.
    Type: Grant
    Filed: April 16, 1998
    Date of Patent: March 7, 2000
    Assignee: Excimer Laser Systems
    Inventors: David J. Elliott, George D. Whitten