Abstract: An abrasive construction for modifying a surface of a workpiece, such as a semiconductor wafer. The abrasive construction comprises: a three-dimensional, textured, fixed abrasive element; at least one resilient element generally coextensive with the fixed abrasive element; and at least one rigid element generally coextensive with and interposed between the resilient element and the fixed abrasive element, wherein the rigid element has a Young's Modulus greater than that of the resilient element.

Abstract: A collet system for mounting, holding, and rotating a rigid disk is described, the collet system including a collet and an expander, the collet having a base portion and fingers longitudinally extending therefrom, the fingers forming a disk contact ring opposite the base. The disk contact ring is less than the thickness of the disk to allow for full surface texturization of the disk. The disk contact ring is not coplanar with any locus of expansion contact points between the collet fingers and the expander, and is sufficiently distant therefrom such that the outward force exerted on the inner disk surface is determined by a cantilever spring deflection experienced by the fingers. This ensures substantially uniform and repeatable outward forces on the inner surface of the disk regardless of minor surface variations along the locus of expansion contact points.

Abstract: A method and apparatus is disclosed for texturizing magnetic storage disks. The disk texturizing apparatus utilizes a combination of servomotors for rotating the disk and oscillating the disk towards and away from a texturizing media. The servomotors are controlled by a closed-loop control system which monitors and synchronizes the angular and linear position of the disk. Through such control, the disk rotation speed may be modulated in conjunction with the linear oscillation, thereby allowing a higher degree of triangularity in the texturization pattern. A pattern generation system and a graphical user interface for specifying, modeling, generating, modifying and displaying disk texturizing patterns are also disclosed. The texturizing pattern may be displayed in polar plot and linear plot form so that the user can more easily visualize and design the texturizing pattern.

Abstract: An apparatus and method is disclosed for texturizing magnetic storage disks in which the vibration due to forces imparted by oscillating motion is greatly decreased. Typically, the oscillating motion is caused by an oscillating spindle assembly which is slidably mounted on a base. The disclosed apparatus and method utilizes a counter-balance slidably mounted to the base which is caused to move in an opposite direction to the oscillating assembly. The apparatus uses a mechanical linkage which includes a yoke attached to the oscillating assembly, and a pulley and cable arrangement, attached to the counter-balance.

Abstract: An apparatus for accurately mounting and aligning a disk on a collet is disclosed. The apparatus uses a female guiding member to move along the surface of a protruding male member on the end of the collet. The female guiding member is positioned such that when mated with the male protrusion on the collet, the disk opening is in axial alignment with the collet. The apparatus grips the disk between two posts and a compliant spool. The disk, when held is allowed to move in directions parallel to the plane of the disk.

Abstract: A collet system for mounting, holding, and rotating a rigid disk substrate is described, the collet system including a collet and an expander, the collet having a base portion and fingers longitudinally extending therefrom. The inner surface of the disk is clamped by the radially expanding fingers at a location which is not coplanar with any locus of expansion contact points between the collet fingers and the expander. The outward radial force exerted on the inner disk surface is thereby determined by a cantilever spring tension experienced by the fingers, thus producing a highly consistent, repeatable force which is robust against small frictional variations in the environment and against small variations in inner diameters among disks. Inward axial movement of the expander into the collet is abuttably stopped at a predetermined offset for increased robustness, tolerance, and repeatability of results.

Abstract: The present invention provides an automated rigid-disk finishing system with "fly-by-wire" control of each of the relevant parameters involved in the texturing process. The system includes an abrasive tape, a means for forcibly pressing the tape against the substrate to cut microscopic grooves into the substrate's surface, and a control means for simultaneously controlling the speed and tension of the tape and for sensing the tension developed in the tape on both sides of the tape/substrate interface. The described system is thus capable of establishing tape speed and tape tension simultaneously, while providing a measure of the actual work being accomplished on the rigid disk surface.

Abstract: The present invention provides an automated rigid-disk finishing system with "fly-by-wire" control of each of the relevant parameters involved in the texturing process. The system includes an abrasive tape, a means for forcibly pressing the tape against the substrate to cut microscopic grooves into the substrate's surface, and a control means for simultaneously controlling the speed and tension of the tape and for sensing the tension developed in the tape on both sides of the tape/substrate interface. The described system is thus capable of establishing tape speed and tape tension simultaneously, while providing a measure of the actual work being accomplished on the rigid disk surface.

Abstract: An apparatus for texturing the front and back surfaces of a rigid-disk substrate used in magnetic recording systems is disclosed. The apparatus comprises first and second mechanical assemblies; each of the assemblies including an abrasive tape, a load-bearing roller member, and a means for moving said tape over said roller member. Each assembly further includes a means for applying various components of force to the roller members to abrasively press the tape against the substrate surface. The invented apparatus also includes a network for mechanically coupling each of the assemblies together such that the applied force components are identical for both the front and back surfaces of the substrate. The applied forces are made independent of the substrate's position or displacement.