Patents Assigned to Extek Cryogenics Inc.
  • Cryopump
    Patent number: 5450729
    Abstract: A cryopump array is described. Each vane of the array is coated with a 3-dimensional adsorbing structure made up of an adhesive which is transparent to passage of gases to be pumped by adsorption and a plurality of pieces of an appropriate adsorbing material adhered on top of one another.
    Type: Grant
    Filed: January 18, 1994
    Date of Patent: September 19, 1995
    Assignee: Extek Cryogenics Inc.
    Inventor: David J. Hilton