Abstract: An interface device for a purging unit for purging a wafer container with a purging gas, which comprises a contact piece for contacting a purging interface of a wafer container, wherein the contact piece is movably arranged in the purging unit and has a gas passage in its interior. A corresponding interface device is provided. The object is to specify an interface device which, when the wafer container is coupled to the purging unit, makes it possible to seal a gas inlet or a gas outlet, to introduce or to discharge a purging gas into the wafer container, thereby compensating for and adapting to vertical and horizontal movements, preventing wear, and fulfilling a passive coupling and sealing function as well as offering maximum durability and reliability. This is achieved by a contact piece which is suspended directly or indirectly in the purging unit by means of a spring device.

Abstract: A purge measuring system for front opening unified pods (“FOUPs”) which are positioned in a FOUP nest. Along with at least one unoccupied/occupied sensor for the FOUP nest, at least one gas feed line and one gas discharge line for feeding and discharging flushing gas respectively is provided. At least one pressure sensor, a flowmeter and a regulator valve are arranged in each gas feed line. The valve is regulated based on the measuring results of pressure sensor and flowmeter. At least one moisture sensor and/or one oxygen sensor are arranged in each gas discharge line.

Abstract: The subject matter of this invention is a device for flexible purge management, comprising a FOUP transport system, a purging gas distribution system, one or more FOUP nests for holding FOUPs and an electronic control system. The overhead FOUP transport system, the gas distribution system and the electrical system run together for the most part. Adapter plates that serve to hold the FOUPs are arranged in the FOUP nests. A computer-supported multi-tier control system controls the device and makes it possible to individually address each FOUP nest and to also operate the remaining FOUP nests when there is partial removal.