Patents Assigned to Fairchild Technologies USA, Inc.
  • Method for temperature controlled spin-coating systems used for making compact discs
    Patent number: 6242044
    Abstract: Disclosed is method and apparatus for distributing a chemical over the surface of a substrate. The method includes depositing the chemical on a portion of the surface of a substrate near the center of the substrate. The method further includes controlling the temperature of the surface of a substrate so that the viscosity of the chemical is calibrated to cause the chemical to be deposited on the surface of the substrate in a substantially uniform manner.
    Type: Grant
    Filed: May 11, 1999
    Date of Patent: June 5, 2001
    Assignee: Fairchild Technologies USA, Inc.
    Inventor: Andreas Ebert
  • Temperature controlled chemical dispenser
    Patent number: 6110280
    Abstract: Disclosed is a temperature controlled dispense arm for dispensing chemicals in a spin coating machine. The temperature controlled dispense arm has a cooling portion containing cooling coils and a dispense arm base having chemical dispense passages. The temperature controlled dispense arm maintains the chemical dispense passages at a cooled temperature as determined by the cooling coils located in the cooling portion.
    Type: Grant
    Filed: May 11, 1999
    Date of Patent: August 29, 2000
    Assignee: Fairchild Technologies USA, Inc.
    Inventor: Andreas Ebert