Abstract: A method of investigating a specimen using charged particle microscopy, comprising the following steps: Using a primary source to produce a pulsed beam of charged particles that propagate along a beam path; Providing a specimen at an irradiation position in said beam path; Using a secondary source to produce repetitive excitations of the specimen; Using a detector to register charged particles in said beam that traverse the specimen after each said excitation, wherein: Said primary source is configured to produce a train of multiple pulses per excitation by said secondary source; Said detector is configured to comprise an integrated array of pixels, each with an individual readout circuit, to register a time-of-arrival of individual particles in said train.