Abstract: A method for micro-fabricating a device on a substrate (20), comprising the steps of providing a cavity (31) having a temporary aperture (35) communicating with the outside; providing a sealing structure (45) adjacent to a perimeter of the temporary aperture (35); applying heat to the sealing structure (45), whereby the sealing structure melts and seals the temporary aperture (35).
Type:
Grant
Filed:
November 28, 2017
Date of Patent:
April 9, 2024
Assignee:
Femtoprint SA
Inventors:
Charles Baur, Yves Bellouard, Daniele Braga, Thomas Fussinger, David Lambelet, Andrea Lovera, Sacha Pollonghini, Arno Rogg