Abstract: A dew and/or frost point measurement instrument and related method are disclosed. An electrically actuated micro/nanoscale resonating element is formed over a resonator substrate. A temperature controlled platform is provided in thermal communication with the resonator substrate. A temperature sensing element is provided in thermal communication with the resonating element. A sustaining amplifier stimulates the resonating element to maintain substantially continuous oscillations at one of its mechanical natural frequencies. A control circuitry monitors the resonator frequency, controls the temperature of the resonator substrate accordingly, and interprets a dew or frost point of a gaseous compound of interest.