Patents Assigned to FEMVIX
  • Electrostatic chuck and method for manufacturing electrostatic chuck
    Patent number: 10347520
    Abstract: Provided is an electrostatic chuck including: a base material; an adsorption unit for adsorbing a wafer by using electrostatic force; an adhesive layer for adhering the adsorption unit to the base material; and an adhesive layer anti-corrosion coating layer provided to cover an exposed surface of the adhesive layer, wherein the adhesive layer anti-corrosion coating layer has no pores or cracks since the adhesive layer anti-corrosion coating layer is made by a method of spraying and coating, at conditions of 0-50° C.
    Type: Grant
    Filed: September 4, 2014
    Date of Patent: July 9, 2019
    Assignees: FEMVIX
    Inventors: Ok Ryul Kim, Ok Min Kim