Abstract: A magnetic member includes a plurality of superparamagnetic particles held by the magnetic member. Each of the plurality of superparamagnetic particles is formed with a particle size which is set at least such that a Neel relaxation time ?n in the each of the superparamagnetic particles becomes shorter than a cycle P of an alternating current magnetic field applied to the magnetic member (?n<P) when the magnetic member is used as an electronic component.

Abstract: A current sensor according to the present invention includes a sensor element and a detector. The sensor element includes a core member, an exciting coil and a detection coil. The sensor element is configured such that, while the exciting coil is fed with an excitation signal, comprising a fundamental component, and when the signal to be detected flows, a signal, including a harmonic component, corresponding to the permeability ? of the core member at that point, being superposed on the fundamental component, is outputted from the detection coil. The detector includes a component extraction unit, a level specification unit, and an information output unit.

Abstract: Provided are a plasma stream generation method, a plasma processing method, a plasma generation apparatus, and a plasma processing apparatus using same, which enable plasma processing with rotating plasma to be controllably performed with stability and thereby improved in quality. The frequencies in four quadrants Z1-Z4 are set at 7, 15, 6, and 20 Hz, respectively. This frequency variability can realize different rotational velocity of plasma in the four-portion partitioned rotational angle regions. The rotational velocities of plasmas P2, P4 are greater than those of plasmas P1, P3. Thus, the rotating plasma, which rotates at a periodically varied rotational velocity as plasma P1, plasma P2, plasma P3, and plasma P4 in that order while traveling in a circular orbit C, can be used for irradiation therewith, thereby performing uniform film formation treatment in first quadrant Z1 to fourth quadrant Z4.

Abstract: Electrically charged droplets and neutral droplets mixed with plasma are removed with better efficiency, and an improvement in the surface treatment precision of film formation by high purity plasma is sought. In a plasma processing apparatus including plasma generating portion A, plasma transport tube B and plasma processing portion C, an insulator interposed plasma processing apparatus is constituted in which plasma transport tube B is made electrically independent from plasma generating portion A and plasma processing portion C electrically by interposing insulator IS and insulator IF between the starting end side and the finishing end side of the plasma transport tube. Plasma transport tube B is divided into multiple small transport tubes B01, B23 through intermediate insulator II1, and each small transport tube is made independent electrically.

Abstract: A plasma stream-derived deposited matter formed on an annular rib for droplet capture in a plasma processing apparatus is prevented from falling into a plasma generation portion and causing a short circuit. The annular rib for the droplet capture is divided into multiple rib segments. Thus, from the beginning of the formation of the deposited matter on the annular rib due to the aggregation of the material in the plasma stream, it is possible to reduce the size of the deposited matter. By reducing the size of this deposited matter, when a piece of the deposited matter falls into the plasma generation portion, the piece of the deposited matter gets into a groove portion provided between a cathode and a wall surface of the plasma generation portion, thereby preventing the electrical short circuit between the cathode and the wall surface.

Abstract: A plasma processing apparatus using a plasma generating apparatus by which droplets mixed in plasma can be efficiently removed and surface processing precision can be improved in film formation wherein high purity plasma is used. A droplet removing portion arranged in a plasma advancing path is composed of a straight plasma advancing tube (P0) connected to a plasma generating portion (A); a first plasma advancing tube (P1) connected to the straight plasma advancing tube (P0) in a bent manner; a second plasma advancing tube (P2) connected to a finishing end of the first plasma advancing tube (P1) by being inclinedly arranged at a predetermined inclination angle with respect to the tube axis of the first plasma advancing tube; and a third plasma advancing tube (P3), which is connected to the finishing end of the second plasma advancing tube (P2) in a bent manner and discharges plasma from a plasma outlet.

Abstract: Provided are a plasma stream generation method, a plasma processing method, a plasma generation apparatus, and a plasma processing apparatus using same, which enable plasma processing with rotating plasma to be controllably performed with stability and thereby improved in quality. The frequencies in four quadrants Z1-Z4 are set at 7, 15, 6, and 20 Hz, respectively. This frequency variability can realize different rotational velocity of plasma in the four-portion partitioned rotational angle regions. The rotational velocities of plasmas P2, P4 are greater than those of plasmas P1, P3. Thus, the rotating plasma, which rotates at a periodically varied rotational velocity as plasma P1, plasma P2, plasma P3, and plasma P4 in that order while traveling in a circular orbit C, can be used for irradiation therewith, thereby performing uniform film formation treatment in first quadrant Z1 to fourth quadrant Z4.

Abstract: A magnetic member includes a plurality of superparamagnetic particles held by the magnetic member. Each of the plurality of superparamagnetic particles is formed with a particle size which is set at least such that a Neel relaxation time ?n in the each of the superparamagnetic particles becomes shorter than a cycle P of an alternating current magnetic field applied to the magnetic member (?n<P) when the magnetic member is used as an electronic component.

Abstract: An object of the present invention is to provide a multiply divided anode wall type plasma generation apparatus, wherein a short circuit between the cathode and the anode is not caused even if deposited matter adhering and depositing on the inner wall of the anode by diffusion plasma detach and fall. Also, an object is to provide a plasma processing apparatus using the same. When the plasma (P) generated between the cathode (2) and the anode (3) is ejected forward from the cathode (2) and diffuses, the diffusing material (41) recrystalizes, adheres, and deposits on the inner wall of an electrode cylindrical body, and detaches and falls as a carbon flake (40). The inner wall of the electrode cylindrical body is multiply divided in the shape of a matrix by means of longitudinal and lateral grooves (37, 38).

Abstract: A plasma stream-derived deposited matter formed on an annular rib for droplet capture in a plasma processing apparatus is prevented from falling into a plasma generation portion and causing a short circuit. The annular rib for the droplet capture is divided into multiple rib segments. Thus, from the beginning of the formation of the deposited matter on the annular rib due to the aggregation of the material in the plasma stream, it is possible to reduce the size of the deposited matter. By reducing the size of this deposited matter, when a piece of the deposited matter falls into the plasma generation portion, the piece of the deposited matter gets into a groove portion provided between a cathode and a wall surface of the plasma generation portion, thereby preventing the electrical short circuit between the cathode and the wall surface.

Abstract: A magnetic fluid is held by a magnetic field in a stationary state and by a centrifugal force during rotation, leaking and splashing of the magnetic fluid caused by the instability of the pumping of a dynamic pressure bearing are prevented without using a magnetic fluid with a high saturation magnetization value, and the service life of the dynamic pressure bearing is extended. For this purpose, a sleeve 3 having a protruding tubular section is fitted and fixed to the outer periphery of the shaft 1 having a thrust plate 2 formed in an axial vicinity so as to be rotatable relatively to the shaft, an annular cover 4 is formed outwardly from the thrust plate 2 in an axial direction, the radially inward end of the annular cover 4 serves as an opening, at least two clearance sections serve as a reservoir 10 for reserving the magnetic fluid, and a magnetomotive force member 15 is provided for concentrating the magnetic flux lines on the radially outer side of the end portion 13 of the magnetic fluid 12.

Abstract: Electrically charged droplets and neutral droplets mixed with plasma are removed with better efficiency, and an improvement in the surface treatment precision of film formation by high purity plasma is sought. In a plasma processing apparatus including plasma generating portion A, plasma transport tube B and plasma processing portion C, an insulator interposed type plasma processing apparatus is constituted in which plasma transport tube B is made electrically independent from plasma generating portion A and plasma processing portion C electrically by interposing insulator IS and insulator IF between the starting end side and the finishing end side of the plasma transport tube. Plasma transport tube B is divided into multiple small transport tubes B01, B23 through intermediate insulator II1, and each small transport tube is made independent electrically.

Abstract: A device for removing droplets in a plasma generator including a tubular traveling passage through which plasma and droplets travel under mixed state is formed, an aperture having a passing hole at an eccentric position is provided in the tubular traveling passage, and a magnetic field generator passing the plasma through the eccentric passing hole of the aperture arranged on an outer circumference of the tubular traveling passage. The plasma further passes through the eccentric passing hole of the aperture after being bent in the tubular traveling passage by a magnetic field generated from the magnetic field generator and the droplets are removed by colliding against the wall face of the aperture at the time of bending.

Abstract: The objective of the present invention is to provide a target exchange type plasma generating apparatus in which the positions of two targets can be adjusted independent of each other. A target exchanging mechanism (6) of a plasma generating apparatus for generating plasma by vacuum arc discharge comprises a main holder (32) driven half a rotation by a main motor (M), containing sections (32a, 32b) arranged opposite to each other across the diameter of the main holder, auxiliary holders (16, 18) rotatably contained in the containing sections (32a, 32b), two auxiliary motors (M1, M2) for spinning the auxiliary holders, sliders (S1, S2) for vertically moving the auxiliary holders (16, 18) in the direction of the spinning shafts of the auxiliary holders, and targets (T1, T2) fitted to the auxiliary holders (16, 18). The positions of the targets (T1, T2) are exchanged by rotating the main holder (32) by half a rotation.

Abstract: A plasma generator for forming a thin film comprises a cathode (4) for supplying constituent particles of an arc plasma and a trigger-and-anode (6) for starting and sustaining the arc plasma. The cathode surface (4a) of the cathode (4) is flat or finely irregular, and the anode surface (6c) of the trigger-and-anode (6) brought into contact with the cathode surface (4a) is flat. The anode surface (6c) is so arranged as to be brought into contact with the whole cathode surface (4a) when plasma is started. The contact point between a fine projection end (4b) of the cathode surface (4a) and the anode surface (6c) is made a plasma emission point. When the projection is consumed by plasma emission, another projection end which can be brought into contact with the anode surface (6c) is used as another plasma emission point, thus enabling intermittent operation of persistently repeating the sequence operation.

Abstract: An audio speaker has a driver unit having a support frame with a central portion forming a magnetic structure defining an annular gap around a central magnetic post, a vibration system having a diaphragm and a voice coil, the voice coil is attached to one side of the diaphragm where the vibration system is fixed to the support frame and where the voice coil is movably mounted in the annular gap, and a magnetic fluid disposed in the annular gap only in a space between one side of the voice coil and a surface of the annular gap having a higher magnetic flux density.

Abstract: An audio speaker includes a driver unit having a magnetic pole case defining a radial gap, a vibration system having a diaphragm and a voice coil where the vibration system is fixed to the drive unit and the voice coil is movably mounted into the radial gap, and a residual magnetic fluid layer disposed on the surfaces of one or more of the magnetic pole case and the voice coil where an air gap exists between the voice coil and the magnetic pole case.

Abstract: The micro-speaker includes a driver unit having a housing, a magnet disposed within the housing forming a radial gap between the magnet and the circumferential walls of the housing, and a magnetic plate disposed on the magnet, a vibration system having a diaphragm and a voice coil where the vibration system is fixed to the drive unit and the voice coil protrudes into the radial gap, and a volatile magnetic fluid in the radial gap about the voice coil.

Abstract: An element-modified ferrofluid comprising a base oil, a plurality of magnetic particles covered with at least one surfactant, and an elemental modifier. The elemental modifier is a metal, a metal mixture, an alloy, or a nonmetal.

Abstract: The method of assembling a speaker includes disposing a quantity of volatile magnetic fluid containing a pre-determined amount of lubricating oil into a radial gap of a driver unit, aligning a vibration system having a diaphragm and a voice coil to the driver unit such that the voice coil is movably mounted into the radial gap, fixing the vibration system to the driver unit, and removing the volatile component of the volatile magnetic fluid. The speaker includes a driver unit having a magnetic pole case defining a radial gap, a vibration system having a diaphragm and a voice coil where the vibration system is fixed to the drive unit and the voice coil is movably mounted into the radial gap, and a residual magnetic fluid layer disposed on the surfaces of one or more of the magnetic pole case and the voice coil where an air gap exists between the voice coil and the magnetic pole case.