Patents Assigned to Fibercheck GmbH
  • Patent number: 8746064
    Abstract: The invention relates to a micromechanical sensor having at least two spring-mass damper oscillators. The micromechanical sensor has a first spring-mass-damper oscillating system with a first resonant frequency and a second spring-mass-damper oscillating system with a second resonant frequency which is lower than the first resonant frequency. The invention also relates to a method for detection and/or measurement of oscillations by means of a sensor such as this, and to a method for production of a micromechanical sensor such as this. The first and the second spring-mass-damper oscillating systems have electrodes which oscillate in a measurement direction about electrode rest positions with electrode deflections which are equal to or proportional to deflections of the spring-mass-damper oscillators.
    Type: Grant
    Filed: August 25, 2011
    Date of Patent: June 10, 2014
    Assignee: Fibercheck GmbH
    Inventors: Marco Dienel, Alexander Sorger, Jan Mehner