Abstract: An apparatus and method for supplying cesium by using an injector is disclosed in the present invention, which increases vaporization efficiency and stably supplies cesium gas for a long period of time. The apparatus includes a mass flow controller controlling an amount of an externally introduced inert gas, a pre-heater pre-heating the inert gas introduced through a first gas flow tube from the mass flow controller, a cesium storage unit emitting cesium by using a pressure gas supplied through a pressure gas supplying tube, an injector emitting the cesium supplied from the cesium storage unit, and a cesium vaporizer vaporizing the cesium emitted from the injector and emitting the inert gas introduced from the pre-heater through a second gas flow tube along with the cesium gas through a third gas flow tube.

Abstract: A method and apparatus for forming an optical coating using negatively charged ions, which form a high quality thin film of high density, are disclosed in the present invention. The apparatus includes a gas flow controller controlling an amount of an externally introduced inert gas, a pre-heater pre-heating the inert gas introduced from the gas flow controller through a first gas flow tube, a cesium vaporizer discharging a cesium gas through a third gas flow tube carried by the inert gas introduced from the pre-heater through a second gas flow tube and a bubbler, a pressure detector detecting a vapor pressure of the cesium vaporizer, a pressure control valve controlling the vapor pressure of the cesium vaporizer, a gas introduction tube introducing the cesium gas to a vacuum chamber, a plurality of targets in the vacuum chamber, and a plurality of cesium discharge units selectively discharging the cesium gas to each surface of the targets.

Abstract: An apparatus and method for supplying cesium that can readily control the amount of supplied cesium gas and continuously supply the cesium gas for a long period of time are disclosed in the present invention. The apparatus for supplying cesium includes a gas flow controller controlling an amount of an externally introduced inert gas, a pre-heater pre-heating the inert gas introduced through a first gas flow tube from the gas flow controller, a cesium vaporizer emitting a cesium gas from a cesium containing source to a third gas flow tube by using the inert gas introduced through a second gas flow tube from the pre-heater, and a pressure detector detecting a vapor pressure of the cesium vaporizer. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure.