Abstract: A method of handling a semiconductor wafer from which a plurality of semiconductor devices are to be fabricated during a semiconductor device fabrication process. The method includes the steps of attaching a flexible connected layer to a semiconductor wafer layer mounted on a carrier substrate and separating the wafer layer from the carrier substrate while supported by the flexible connected layer.
Type:
Grant
Filed:
April 19, 2002
Date of Patent:
January 25, 2005
Assignee:
Filtronic Compound Semiconductor Ltd.
Inventors:
Matthew Francis O'Keefe, John Melvyn Cullen