Patents Assigned to FINETECH. CO., LTD.
  • Patent number: 9592473
    Abstract: The present invention relates to a system for separating and recycling a perfluorinated or perfluor compound, and more particularly, to a system for separating and recycling a perfluorinated compound, which is developed to prevent damage of separation membranes and degradation of the separation efficiency of through the application of a constant pressure to respective separation membranes when the perfluoro compound passes through a plurality of separation membranes in a process of effectively separating, removing and recycling the perfluoro compound including sulfur hexafluoride primarily generated in a semiconductor manufacturing process.
    Type: Grant
    Filed: July 10, 2013
    Date of Patent: March 14, 2017
    Assignee: FINETECH. CO., LTD.
    Inventor: Young-Seok Roh