Patents Assigned to First Nano, Inc.
  • Method and apparatus of carbon nanotube fabrication
    Publication number: 20040053440
    Abstract: A method of fabricating carbon nanotubes in a nanotube growth apparatus including executing a nanotube growth process recipe and monitoring a safety condition during the executing step. The executing step is interlocked to the monitoring step such that the executing step can be aborted based on the output of the monitoring step.
    Type: Application
    Filed: March 28, 2003
    Publication date: March 18, 2004
    Applicant: First Nano, Inc.
    Inventors: Jonathan W. Lai, Dennis M. Adderton, Stephen C. Minne
  • Method and apparatus of carbon nanotube fabrication
    Publication number: 20040037767
    Abstract: A carbon nanotube fabricating system and method that employs control automation to ensure safety during the fabrication of nanotubes in a variety of applications. A method of producing carbon nanotubes in a process chamber includes executing a nanotube growth recipe and purging oxygen from the process chamber in response to the executing step. The purge step is performed by flowing an inert gas through the process chamber at appropriate times and for predetermined durations during the fabrication process.
    Type: Application
    Filed: March 28, 2003
    Publication date: February 26, 2004
    Applicant: First Nano, Inc.
    Inventors: Dennis M. Adderton, Jonathan W. Lai, Stephen C. Minne