Abstract: A method and apparatus (42) for laser scribing coatings on glass sheet substrates by conveying the substrate adjacent a laser source (83) that provides a pulsed laser beam (84) with a wavelength at a near-infrared fundamental frequency and having a frequency in the range of 50 to 100 kilohertz and a pulse duration in the range of 8 to 70 nanoseconds, and by reflecting the beam by an XYZ galvanometer controlled mirror system (90) toward an uncoated surface of the substrate for passage therethrough to the coating on the other surface to provide overlapping ablations through the coating and scribing at a speed of at least 1000 millimeters per second.

Abstract: Novel ligated compounds of tin, titanium, and zinc are useful as metal oxide CVD precursor compounds without the detriments of extreme reactivity yet maintaining the ability to produce high quality metal oxide coating by contact with heated substrates.