Patents Assigned to Flexus, Inc.
  • Laser apparatus and method for measuring stress in a thin film using multiple wavelengths
    Patent number: 5134303
    Abstract: In accordance with the present invention, an apparatus and a method for measuring the radius of curvature of a surface using laser beams of multiple wavelengths are provided. The present invention avoids poor measurement due to destructive interference of the beams reflected at a thin film's upper and lower surfaces. The present invention is applicable to laser reflection stress measurement apparatuses of both scanning and beam-splitting types.
    Type: Grant
    Filed: August 14, 1990
    Date of Patent: July 28, 1992
    Assignee: Flexus, Inc.
    Inventors: Ilan A. Blech, Dov E. Hirsch