Patents Assigned to FLOWMEMS, INC.
  • Flow Sensor and Method of Fabrication
    Publication number: 20100078753
    Abstract: A method for forming a flow sensor having self-supported heat-carrying elements is disclosed. Self-supported heat-carrying elements are capable of operating with higher thermal efficiency, enabling lower power consumption and higher sensitivity, due to a lack of heat loss into a supporting membrane. Self-supported heat-carrying elements facilitate wider operating temperature range and compatibility with harsh media.
    Type: Application
    Filed: October 1, 2008
    Publication date: April 1, 2010
    Applicant: FLOWMEMS, INC.
    Inventors: Mehran Mehregany, Nelsimar Moura Vandelli, JR.