Abstract: A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.

Abstract: Doped silicon carbide structures, as well as methods associated with the same, are provided. The structures, for example, are components (e.g., layer, patterned structure) in MEMS structures. The doped silicon carbide structures may be highly conductive, thus, providing low resistance to electrical current. An in-situ doping process may be used to form the structures. The process parameters can be selected so that the structures have a low residual stress and/or low strain gradient. Thus, the structures may be formed having desired dimensions with little (or no) distortion arising from residual stress and/or strain gradient. The high conductivity and mechanical integrity of the structures are significant advantages in MEMS devices such as sensors and actuators.

Abstract: A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.

Abstract: An optic array connector is disclosed. The fiber optic array includes a first faceplate having a plurality of openings. The first faceplate is oriented in a first direction. The fiber optic array also includes a second faceplate having a plurality of openings. The second faceplate is oriented in a second direction. A plurality of optical fibers are inserted through the plurality of openings in the first faceplate and the plurality of openings in the second faceplate. The second faceplate and the first faceplate are adjusted such that a portion of the openings in the first faceplate and a portion of the openings in the second faceplate contact and hold the optical fibers.