Patents Assigned to FNS Tech No., Ltd.
  • Polishing pad having micro-grooves on the pad surface
    Patent number: 8900036
    Abstract: A polishing pad is provided herein, which may include a plurality of soluble fibers having a diameter in the range of about 5 to 80 micrometers, and an insoluble component. The pad may also pad include a first surface having a plurality of micro-grooves, wherein the soluble fibers form the micro-grooves in the pad. The micro-grooves may have a width and/or depth up to about 150 micrometers. In addition, a method of forming the polishing pad and a method of polishing a surface with the polishing pad is disclosed.
    Type: Grant
    Filed: March 16, 2012
    Date of Patent: December 2, 2014
    Assignee: FNS Tech No., Ltd.
    Inventors: Oscar K. Hsu, Marc C. Jin, David Adam Wells, John Erik Aldeborgh