Abstract: An x-ray collimator for use primarily in x-ray lithography for semiconductor fabrication provides a multi-channel collimator to produce a series of collimated beams from an x-ray source. Each channel in the array gathers photons from a small solid angle of the x-ray source and employs at least two pairs of orthogonal spherical mirrors in grazing incidence to produce a collimated beam. An array of flat mirrors steer the collimated beams into a slightly converging geometry. A beam assembler then combines the beams to create a single, large collimated beam that can be used to expose the die.