Abstract: A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to said support structure; and, a proof mass flexibly suspended by said suspension springs; wherein at least one of said suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass.
Type:
Grant
Filed:
July 14, 2020
Date of Patent:
March 8, 2022
Assignees:
STICHTING VU-VUMC, FOM-NIKHEF
Inventors:
Eric Hennes, Alessandro Bertolini, Johannes Franciscus Van Den Brand
Abstract: A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to the support structure; and, a proof mass flexibly suspended by the suspension springs; wherein at least one of the suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass.
Type:
Grant
Filed:
December 6, 2016
Date of Patent:
July 14, 2020
Assignees:
STICHTING VU-VUMC, FOM-NIKHEF
Inventors:
Eric Hennes, Alessandro Bertolini, Johannes Franciscus Van Den Brand
Abstract: A method for managing communication in a wireless mesh network comprising a plurality of wireless nodes and a wireless node for use in such network are described, wherein said method may comprise: providing a time slot schedule (frame), preferably a TDMA time slot schedule (frame), comprising one or more time slots, including a transmission time slot enabling a node to transmit a broadcast message, a reception time slot enabling a node to receive a broadcast message from one or more other nodes; and/or a sleep time slot for configuring said node in an idle state; and, assigning said time slots to nodes in said network on the basis of the position of said nodes in said network.
Type:
Grant
Filed:
June 6, 2014
Date of Patent:
May 19, 2020
Assignees:
STICHTING VU-VUMC, FOM-NIKHEF
Inventors:
Henk Jan Bulten, Johannes Franciscus Josephina Van Den Brand