Abstract: Common sources of different (e.g., concentrated) process materials are controllably supplied to multiple blending manifolds associated with multiple process tools, processing stations, or other points of use, to create an independently controllable process material blend for each tool, station, or point of use. Multi-constituent process materials may be circulated from a supply container through a blending manifold to a return container to ensure homogeneity until immediately prior to blending and use. Such containers may include liner-based containers adapted for pressure dispensation.
Type:
Grant
Filed:
December 8, 2008
Date of Patent:
August 13, 2013
Assignee:
Foresight Processing, LLC
Inventors:
John E. Q. Hughes, Donald D. Ware, Steven M. Lurcott, Peter Wrschka
Abstract: Common sources of different (e.g., concentrated) process materials are controllably supplied to multiple blending manifolds associated with multiple process tools, processing stations, or other points of use, to create an independently controllable process material blend for each tool, station, or point of use. Multi-constituent process materials may be circulated from a supply container through a blending manifold to a return container to ensure homogeneity until immediately prior to blending and use. Such containers may include liner-based containers adapted for pressure dispensation.
Type:
Application
Filed:
December 8, 2008
Publication date:
January 13, 2011
Applicant:
FORESIGHT PROCESSING, LLC
Inventors:
John E.Q. Hughes, Donald D. Ware, Steven M. Lurcott, Peter Wrschka