Abstract: The present invention discloses an integrated force sensor, characterized in comprising: a substrate, flexible through-cavities formed on the substrate, and a flexible skin covering the flexible through-cavities, wherein a lug boss is formed on the substrate; the flexible through-cavities are divided into two segments under the action of the lug boss, one end of the flexible through-cavities is connected with a pressure sensor used to measure the internal pressure of the flexible through-cavities, and the other end of the flexible through-cavities is communicated with outside air. In the invention, the force to be measured changes the gas pressure by changing the shape of an object and detects the magnitude of the force to be measured by detecting the gas pressure. Besides, the overloaded pressure can be released through the pressure release mechanism, without affecting the safety of the film of the pressure sensor or resulting in permanent damage to film.

Abstract: A force sensor array that includes a circuit board, a plurality of gas pressure sensors arranged on the circuit board, and an energy-absorbing film layer covering a gas nozzle of each gas pressure sensor. The energy-absorbing film layer has an elastic deformability, and the energy-absorbing film layer can convert impact kinetic energy into heat energy.

Abstract: This invention discloses a force sensor array, characterized in that it comprises: a circuit board, a plurality of gas pressure sensors arranged on the circuit board, and an energy-absorbing film layer covering the gas nozzle of each gas pressure sensor; the said energy-absorbing film layer has a certain elastic deformability, and can convert impact kinetic energy into heat energy. Through the provision of the energy-absorbing film layer, circuit board and other structures, when pressure is applied slowly, the energy-absorbing film layer of this invention shows the characteristics of solid to transfer pressure; different gas pressure sensors sense different pressure values during stress. The circuit board collects the pressure values fed back by the gas pressure sensors to show the spatial distribution of stress.