Patents Assigned to FOUNDATION HANYANG UNIVERSITY) Seoul, R
  • Pellicle holder, pellicle inspection apparatus, and pellicle inspection method
    Patent number: 11137693
    Abstract: Provided is a pellicle holder. The pellicle holder includes: an outer frame formed therein with a pellicle seating space; and a plurality of holding legs extending in a direction from the outer frame toward a center of the pellicle seating space, wherein the holding leg is extended or contracted in the extension direction and has one end on which a portion of a pellicle is mounted to support the pellicle.
    Type: Grant
    Filed: November 21, 2019
    Date of Patent: October 5, 2021
    Assignees: IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY), FOUNDATION HANYANG UNIVERSITY) Seoul, R
    Inventors: Jin Ho Ahn, Young Woong Kim, Dong Gon Woo