Abstract: The technology disclosed relates to a system and methods for monitoring a probe measurement system, such as monitoring the condition of a probe head or detecting a defect of a probe head. A captured image of a probe head can be processed using an image processing model to extract a feature of the probe head, and the extracted feature can be analyzed to determine a condition indicator and generate a defect score. A defect score can be evaluated based on a pre-defined threshold, and a particular defect score satisfying the pre-defined threshold can indicate that there is a nonconformance associated with the determined indicator, such as a probe head defect. Furthermore, a nonconformance record can be logged for the probe head in response to a defect score satisfying a pre-defined threshold.
Type:
Application
Filed:
August 22, 2025
Publication date:
February 26, 2026
Applicant:
Four Dimensions, Inc.
Inventors:
Jian MI, Jung LEE, Jerry CUTINI, Michael WONG, Tatiana DIMITROVA
Abstract: Provided is a test system and method that permits automatically interchanging a plurality of tools to seamlessly perform various functions on a sample. Each tool is mounted in an assembly and the sample is mounted on a chuck. A path is defined in a plane along which a carriage on which the tool assemblies are mounted is transported with the tools each positioned in the same attitude with respect to, and distance from, that path. The carriage is transported along the path to a position where one of the tools is adjacent the chuck which is rotated, if necessary, to position a desired point of interest on the sample immediately adjacent the tool. Once positioned, the tool engages the sample to perform a test. Following testing, the tool is disengaged from the sample and the process repeated as necessary for each additional test to be performed on the sample.
Abstract: Provided is a test system and method that permits automatically interchanging a plurality of tools to seamlessly perform various functions on a sample. Each tool is mounted in an assembly and the sample is mounted on a chuck. A path is defined in a plane along which the chuck is transported with the tools each positioned in the same attitude with respect to, and distance from, that path. The chuck is transported along the path to a position adjacent one of the tools and rotated, if necessary, to position a point of interest on the sample immediately adjacent the tool. Once positioned, the tool engages the sample to perform a test. Following testing, the tool is disengaged from the sample and the process repeated as necessary for each additional test to be performed on the sample.