Abstract: A magnetic-field-assisted plasma coating system and method are provided. In another aspect, a coating system employs a cathode with a linearly moveable magnetic field. A further aspect employs a workpiece as an anode within which is located an elongated cathode which internally coats a bore of the workpiece. Still another aspect of the present system and method employs an elongated and hollow cathode with at least one magnetic source therein. In yet another aspect, end caps or plates seal against one or more open ends of a workpiece bore to be coated, with a cathode inserted into the bore and a vacuum being created within the bore such that the workpiece itself defines at least a portion of a vacuum chamber.
Type:
Application
Filed:
February 24, 2023
Publication date:
June 29, 2023
Applicants:
Board of Trustees of Michigan State University, Franhofer USA
Inventors:
Thomas Schuelke, Michael Becker, Lars Haubold, Qi Hua Fan