Abstract: The invention relates to an adaptive mirror based on a ceramic substrate having a corresponding reflector and piezoelectric actuators, a cooling device being integrated in the substrate. The invention likewise relates to a method for the production of such mirrors. The mirrors according to the invention are used for the modulation or deformation of a laser wavefront of high power.
Type:
Grant
Filed:
March 17, 2009
Date of Patent:
July 9, 2013
Assignees:
Fraunhofer-Gesellschaft zur Foerferung der Angewandten E.V., Friedrich-Schiller-Universitaet Jena
Inventors:
Claudia Bruchmann, Erik Beckert, Thomas Peschel, Christoph Damm