Abstract: The invention relates to a method for producing thermotropic casting resin systems that comprise at least one matrix polymer including at least one thermotropic monomer compound which cannot be mixed with the matrix polymer, whereby the matrix polymer an the thermotropic monomer compound are selected in such a way that their refraction indices are almost the same in a temperatrue range that is below the temperature required for structural change and that reaches the temperature of structural change of the thermotropic monomer compound, the casting resin system being translucent or transparent in this termperature range. After dissolving the monomer thermotropic compund in a matrix solution containing a photohardening oligomer, reactive diluents and photoinitiators and a liquid, photohardenable system is obtained, photoradiation with exclusion of oxygen is carried out for hardening.

Abstract: A method and a device for generating extreme ultraviolet (EUV) and soft x-ray radiation from a gas discharge. The device has at least two electrodes each having a flush opening by which an axis of symmetry is defined, in which an intermediate space with a wide spatial homogenous gas filling between anode and cathode is provided. The electrodes are formed in such a way, that the gas discharge is formed exclusively in the volume defined by the flush openings. The current pulses with respect to amplitude and period duration are selected in such a way that a dense hot plasma channel is formed on the axis of symmetry, the plasma being the source of EUV and/or soft x-ray radiation. The preferred area of application is the EUV projection lithography in the spectral range around 13 nm.