Abstract: Provided is a voice sensor comprising a piezoelectric material layer includes a substrate, a support layer, a metal layer, a piezoelectric material layer on the metal layer and an electrode on the piezoelectric material layer, and the substrate integrally supports a device layer of the voice sensor by exposing a part of a thin film including the piezoelectric material layer, the electrode and a polymer layer.
Type:
Grant
Filed:
June 14, 2021
Date of Patent:
May 9, 2023
Assignees:
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY, FRONICS INC.
Inventors:
Keonjae Lee, Young Hoon Jung, Jae Hyun Han, Hee Seung Wang, Mingi Chung
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