Patents Assigned to FSI Interntional
  • Patent number: 5820692
    Abstract: A process module which can be integrated with a reduced pressure cluster tool system for semiconductor wafer processing to perform ambient or near ambient pressure reactions without requiring an intermediate buffer chamber.
    Type: Grant
    Filed: January 16, 1996
    Date of Patent: October 13, 1998
    Assignee: FSI Interntional
    Inventors: James J. Baecker, D. Scott Becker, Michael J. Foline, Todd K. Maciej