Patents Assigned to FUJI ELECTRIC HOLDINGS.,LTD.
  • Publication number: 20090289249
    Abstract: Disclosed is an oxide semiconductor having an amorphous structure, wherein higher mobility and reduced carrier concentration are achieved. Also disclosed are a thin film transistor, a method for producing the oxide semiconductor, and a method for producing the thin film transistor. Specifically disclosed is an oxide semiconductor which is characterized by being composed of an amorphous oxide represented by the following a general formula: Inx+1MZny+1SnzO(4+1.5x+y+2z) (wherein M is Ga or Al, 0?x?1, ?0.2?y?1.2, z?0.4 and 0.5?(x+y)/z?3). This oxide semiconductor is preferably subjected to a heat treatment in an oxidizing gas atmosphere after film formation. Also specifically disclosed is a thin film transistor which is characterized by comprising the oxide semiconductor.
    Type: Application
    Filed: May 25, 2007
    Publication date: November 26, 2009
    Applicant: FUJI ELECTRIC HOLDINGS.,LTD.
    Inventors: Hisato Kato, Haruo Kawakami, Nobuyuki Sekine, Kyoko Kato