Abstract: A thermal spray powder, which includes granulated and sintered cermet particles that contain a metal having an indentation hardness of 500 to 5,000 N/mm2, is disclosed. The granulated and sintered cermet particles have an average size of 30 ?m or less. The granulated and sintered cermet particles are composed of primary particles having an average size of 6 ?m or less. The granulated and sintered cermet particles have a compressive strength of from 100 to 600 MPa. It is preferable that the metal contained in the granulated and sintered cermet particles includes at least one selected from the group consisting of cobalt, nickel, iron, aluminum, copper, and silver. The thermal spray powder is usable in a low-temperature thermal spraying process such as cold spraying using nitrogen as a working gas.

Abstract: To provide a resist composition for negative tone development, which can form a pattern having a good profile improved in the pattern undercut and moreover, can reduce the line edge roughness and enhance the in-plane uniformity of the pattern dimension, and a pattern forming method using the same. A resist composition for negative tone development, comprising (A) a resin capable of increasing the polarity by the action of an acid to increase the solubility in a positive tone developer and decrease the solubility in a negative tone developer, (B) a compound capable of generating an acid having an acid dissociation index pKa of ?4.0 or less upon irradiation with an actinic ray or radiation, and (C) a solvent; and a pattern forming method using the same.