Abstract: The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve. A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3.

Abstract: A fluid controller is provided having a flow path through which a fluid can flow, a closed space separated from the flow path by an isolation member, and a leak port capable of communicating the closed space with an external part. An anomaly detection device for detecting an anomaly has a pressure sensor detachably fixed to the leak port, a pressure sensor for detecting the pressure in the closed space, a processing module for executing a predetermined information processing, and an detachable mechanism for blocking the leak port from the external part in the state of being fixed. The processing module determines an anomaly of the fluid controller by comparing a detection value detected by the pressure sensor to a predetermined threshold, and transmits a discrimination result of the anomaly of the fluid controller to a server.

Abstract: In a semiconductor fabrication apparatus composed of a plurality of components, such as fluid control devices, a manager is to be enabled to identify components by intuition. Information on the identified component is to be provided to the manager in an easy-to-understand manner. In a system in which a manager terminal 3 and an information processor 2 are communicably configured via networks NW1 and NW2, the manager terminal 3 receives component information on a semiconductor fabrication apparatus 1 from the information processor 2. Upon the identification of the position of a component constituting the semiconductor fabrication apparatus 1 on the captured image of the semiconductor fabrication apparatus 1 using an identification processing unit 32, a compositing processing unit 33 creates a composite image in which component information is composited with the captured image at the position of the component identified, and an image display unit 34 displays the composite image.

Abstract: The object of the present invention is to form a chromium-oxide film, excellent in corrosion resistance, without containing an oxide film of other metal onto the metallic material. The chromium-oxide passivation film, excellent in corrosion resistance, without containing the oxide film of other metal can be formed inexpensively and in a short time, and a fluid supplying system for safely supplying fluid with hard corrosivity is able to be provided. One step of forming the passivation film consisting of a chromium oxide layer by giving heat treatment, in an oxidizing atmosphere, after coating chromium on the metallic material having a surface roughness (Ra) not more than 1.5 ?m.

Abstract: The present invention provides a cardiac pacing system based on biological activities, comprising: a) at least one nerve activity sensing means which senses nerve activity of a cardiac sympathetic nerve and/or a vagal nerve, and outputs a plurality of input nerve activity signals; b) a calculating means which receives the input nerve activity signals, calculates a transfer function by computing a Fourier transform of normal nerve activity signals and a normal heart rate signal from normal cardiovascular system, calculates an impulse response by computing an inverse Fourier transform of the transfer function, calculates a plurality of pacing signals for control of a heart rate using a convolution integral between the input nerve activity signals and the impulse response, and outputs the pacing signals; and c) a pacing means which receives the pacing signals, and stimulates the heart based on the pacing signals such that heart rate is regulated.

Abstract: A blood pressure regulating system uses a native regulation rule to estimate at least one nerve activity in response to blood pressure changes, comprising at least one blood pressure sensing means which senses blood pressure and outputs a input blood pressure signal, a calculating means which receives the input blood pressure signal, calculates a transfer function by computing a Fourier transform of a normal blood pressure signal and a normal sympathetic nerve activity from normal cardiovascular system, calculates an impulse response by computing an inverse Fourier transform of the transfer function, calculates a sympathetic nerve stimulation signal using a convolution integral between the input blood pressure signal and the impulse response, and outputs the sympathetic nerve stimulation signal, and a stimulating means which receives the sympathetic nerve stimulation signal, and stimulates the sympathetic nerve innervating vascular beds based on the sympathetic nerve stimulation signal such that blood pressur

Abstract: A distributed cardiac pacing system comprises a first ultra miniature integrated cardiac pacemaker adapted to be placed in an atrial myocardium and a second ultra miniature integrated cardiac pacemaker adapted to be placed in a ventricular myocardium.

Abstract: A medical treating system based on biological activities characterized by biological activity sensing means for sensing biological activity information produced by biological activities and outputting a biological activity signal, calculating means for receiving, analyzing, and processing the biological activity signals from the biological activity sensing means, calculating an organism stimulation signal, and outputting the organism stimulation signal, and organism stimulating means for receiving the organism stimulation signal calculated by the calculating means and stimulating an organism according to the organism stimulation signal. A cardiac pacing system based on the treating system, a blood pressure regulating system, and a cardiac disease treating system are also disclosed.

Abstract: The object of the present invention is to form a chromium-oxide film excellent in corrosion resistance without containing an oxide film of other metal onto the optional metallic material. The chromium-oxide passivation film excellent in corrosion resistance without containing the oxide film of other metal can be formed inexpensively and in a short time, and a fluid supplying system for supplying fluid hard in corrosivity in safety is able to be provided. This invention comprises a step of forming the passivation film consisting of a chromium oxide by giving heat treatment in an oxidizing atmosphere after coating chromium on metallic material of which surface roughness (Ra) of a coat surface is not more than 1.

Abstract: A diaphragm valve 1 is provided with a body 2 having a flow-in passage 6, a flow-out passage 7, and a valve seat 8 formed between the passages; a diaphragm 3 installed in the body 2 and permitted to rest on and move away from the valve seat 8; and a driving means 4 installed on the body 2 to allow the diaphragm 3 to rest on and move away from the valve seat 8, wherein synthetic resin films 5 of predetermined thickness are coated on fluid-contacting parts 25 of the afore-mentioned body 2 and diaphragm 3. A diaphragm valve in accordance with the present invention prevents corrosion of the valve members caused by accumulation and adherence of substances produced by thermal decomposition, and prevents clogging caused by substances produced, and prevents seat leakage when applied in the vacuum exhaust system of a semiconductor manufacturing facility.

Abstract: Welding of material such as a piping using ferrite system stainless steel, in which a back sealed gas used for conventional welding is switched from argon gas (or a hydrogen gas/argon gas mix) to an argon gas to which an oxidizing gas is doped at the time of forming a chromium oxide passivation film. Welding conditions are set at the temperature in which the inner surface of the piping does not melt at the time of forming the chromium oxide passivation film. The temperature of the welding piping is set uniformly between welding conditions in conventional welding and welding conditions at the time of forming the chromium oxide passivation film, and in order to replace gases used with conventional welding with gases used at the time of forming the chromium oxide passivation film. A cycle of one round or more is performed under the welding conditions for forming a chromium oxide passivation film, thereby, to form the chromium oxide passivation film on a weld in concurrence with welding.

Abstract: The present invention provides a fixing structure for a welding electrode and a welding head which enable improvement of durability of a welding electrode, improvement of work efficiency in welding, and reduction of time required for welding and also which make it possible to execute welding for a long time with high reliability. In this fixing structure, a fixed section of a welding electrode is inserted via a thermally conductive material into an inserting section of a fixing base and a peripheral surface of the fixed section of the welding electrode is uniformly contacted to the fixing base to fix the welding electrode to the fixing base.

Abstract: A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.

Abstract: A fluid control apparatus having a plurality of fluid control members each further having, a blocklike body with an upper side and a lower side, at least one monofunctional member for controlling fluid mounted on the upper side of the blocklike body, and at least one fluid channel formed between the monofunctional member for controlling fluid and the bottom side of the blocklike body; a plurality of couplings each further having, a blocklike body mounted to the bottom surface of at least one fluid control member, at least one communication channel for fluids communicating between at least two fluid channels of at least two different fluid control members; and a base plate for supporting a plurality of couplings. Each of the plurality of fluid control members is mounted to each of the plurality of couplings so as to be individually removable therefrom.

Abstract: A valve mount having two valves removably installed thereon from above as arranged in a direction comprises an inflow channel forming member having a channel in communication with an inlet of the valve disposed at one end thereof, a communication channel forming member having a channel for causing an outlet of the valve at the end to communicate with an inlet of the other valve adjacent thereto, an outflow channel forming member having a channel in communication with an outlet of the other valve, and a subchannel forming member having a channel in communication with an inlet-outlet port formed in the other valve.

Abstract: A cutter for facing ends of tubes has a cutting edge perpendicular to the axis of a drive shaft and extending obliquely from a plane containing a reference side face of the cutter. The cutter has a base end portion fitted in a cutter mount groove which is defined by a reference side face a specified distance away from the drive shaft axis. The cutter is positioned as shifted a predetermined distance along the length of the groove, with the cutter reference side face bearing on the groove-defining reference side face, whereby the cutter is adapted to cut the tube end in a direction a predetermined angle outward with respect to a tangential direction of the tube at the cutting position.

Abstract: An object of the present invention is to provide a lead frame and a material for lead frame which insure excellent bonding and enables substantial reduction of time for production because such processes as plating are not required and furthermore are excellent in abration resistance.The present invention is characterized in that a silver layer having a construction where amplitude of a refracted ray refracted on the (200) surface is 1/3 or more of the amplitude of refracted X ray refracted on the (111) surface comprises an outer lead section of the base material for the lead frame. The base material is preferably copper, copper-alloy, iron, or iron alloy. The silver layer is formed, for instance, by means of silver plating, and the thickness is preferably in a range from 8 m to 30 m. An intermediate layer may be provided between a surface of the base material and the silver layer.

Abstract: A nonseparable thrust ball bearing comprising a pair of races spaced apart in the direction of axis of rotation, a plurality of balls rollable between the races, and a connecting ring rotatably interconnecting the inner peripheries of the races. The ring comprises a hollow cylinder portion, and outer flanges formed at the respective ends of the cylinder portion generally at a right angle therewith and in engagement with the respective races. The cylinder portion is fitted at one end thereof in the corresponding one of the races with a clearance formed therebetween, and the flange of the ring at said one end thereof is fitted in a cutout formed in the corresponding race, with a clearance provided in the cutout around the flange.