Patents Assigned to Fujikin Incorporated
  • Patent number: 11326742
    Abstract: Provided is a valve for high-pressure gas, wherein a sheet member is provided inside a through hole formed in a valve body of the valve, wherein the sheet member constitutes a channel for high-pressure gas inside the through hole, wherein the sheet member is fixed inside the through hole by a pressing member, wherein an end opening of the through hole is closed by a lid member, wherein a gasket is provided at a peripheral part of the end opening of the through hole, wherein the gasket is sandwiched between the lid member and the valve body, wherein the lid member is pressed toward the valve body by a plug, and wherein a bearing is provided between the plug and the lid member.
    Type: Grant
    Filed: February 7, 2018
    Date of Patent: May 10, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Yasumasa Yanagida, Koji Hiramatsu, Tadayuki Yakushijin
  • Patent number: 11326921
    Abstract: The flow rate measuring method is performed in a common gas supply system comprising a plurality of gas supply paths each having a first valve, and a gas measuring device formed downstream side of the plurality of gas supply paths, having a pressure sensor, a temperature sensor, and a downstream side second valve.
    Type: Grant
    Filed: February 8, 2018
    Date of Patent: May 10, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Yohei Sawada, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 11320056
    Abstract: The present invention provides a miniaturized valve device capable of dramatically increasing the degree of freedom in arranging a flow path of a valve body while securing a necessary flow rate. The valve device includes a valve seat support provided in an accommodation recess and having a support surface with which a sealing surface of a valve seat abuts and supports a pressing force from the sealing surface; a diaphragm provided in the accommodation recess so as to abut and be separable from a seating surface of the valve seat and seals the opening side of the accommodation recess; the valve seat support having sealing surfaces which cooperates with a part of the inner wall surface of the accommodation recess to bock the communication between a primary flow path and a secondary flow path, and a detour passage that connects the primary flow path and a flow passage of the valve seat.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: May 3, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara
  • Patent number: 11322372
    Abstract: A fluid supply device includes a condenser, a tank that stores the fluid, a pump that pressure-feeds the fluid toward a processing chamber, a main pipe connecting the tank and the pump and transferring the liquid stored in the tank to the pump using a weight of the liquid, and a discharging pipe that is connected to the main pipe at a lowest position of the main pipe at one end, is opened to the atmosphere at the other end, and vaporizes and discharges the liquid in the tank and the main pipe to the outside. The discharging pipe is formed so that, after the liquid in the tank and the main pipe is fully discharged, a liquid pool that separates a space on the atmosphere side and a space on the main pipe side of the discharging pipe is temporarily produced in the discharging pipe.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: May 3, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Toshihide Yoshida, Yukio Minami, Tsutomu Shinohara
  • Patent number: 11306830
    Abstract: A valve device includes a valve body; a valve seat; an inner disk made of a metal alloy having an inner annular portion, outer annular portion and a connecting portion that connects the inner annular portion and the outer annular portion; a diaphragm made of a metal alloy covering the inner disk and the valve seat and moving between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat to enable and shuts off communication between the first flow path and the second flow paths; and a presser adapter that presses a peripheral edge portion of the diaphragm toward the outer annular portion; and the inner disk has a hardness higher than the valve seat and lower than both the valve body and the diaphragm.
    Type: Grant
    Filed: May 31, 2019
    Date of Patent: April 19, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kenta Kondo, Tsutomu Shinohara, Tomohiro Nakata, Hidenobu Sato
  • Publication number: 20220082176
    Abstract: A valve device with which a flow rate can be adjusted precisely includes: an operating member for operating a diaphragm provided in such a way as to be capable of moving between a closed position in which the diaphragm closes a flow path and an open position in which the diaphragm opens the flow path; a main actuator for moving the operating member to the open position or the closed position in response to the pressure of a supplied driving fluid; an adjustment actuator for adjusting the position of the operating member positioned in the open position; and a position detecting mechanism for detecting displacement of the operating member with respect to a valve body.
    Type: Application
    Filed: January 23, 2020
    Publication date: March 17, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Ryutaro TANNO, Toshihide YOSHIDA, Daihi TSUCHIGUCHI, Yuya SUZUKI, Kenta KONDO, Tomohiro NAKATA, Tsutomu SHINOHARA, Masahiko TAKIMOTO
  • Publication number: 20220074851
    Abstract: A Concentration measurement device 100 comprises: a measurement cell 4 having a flow path through which a gas flows, a light source 1 for generating incident light to the measurement cell, a photodetector 7 for detecting light emitted from the measurement cell, a pressure sensor 20 for detecting a pressure of the gas in the measurement cell, a temperature sensor 22 for detecting a temperature of the gas in the measurement cell, and an arithmetic circuit 8 for calculating a concentration of the gas based on an output P of the pressure sensor, an output T of the temperature sensor, an output I of the photodetector, and an extinction coefficient ?, wherein the arithmetic circuit 8 is configured to calculate the concentration using the extinction coefficient ? determined on the basis of the output of the temperature sensor 22.
    Type: Application
    Filed: January 21, 2020
    Publication date: March 10, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Kazuteru TANAKA, Masahiko TAKIMOTO, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 11269362
    Abstract: A flow rate control method performed using a flow rate control device 100 comprising a first control valve 6 provided in a flow path, a second control valve 8 provided downstream of the first control valve, and a pressure sensor 3 for measuring fluid pressure downstream of the first control valve, the method comprising steps of: (a) closing the opening of the first control valve from a state in which, while controlling the opening of the first control valve based on an output of the pressure sensor so as to be the first flow rate, maintaining the opening of the second control valve in an open state, and flowing a fluid at the first flow rate; and (b) based on the output of the pressure sensor, the pressure remaining downstream of the first control valve is controlled by adjusting the opening of the second control valve, and flowing the fluid at the second flow rate downstream of the second control valve.
    Type: Grant
    Filed: April 19, 2019
    Date of Patent: March 8, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kaoru Hirata, Shinya Ogawa, Katsuyuki Sugita, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 11261990
    Abstract: An actuator includes a casing having a first annular groove formed in an inner peripheral portion thereof; a piston having a second annular groove formed in an outer peripheral portion thereof, provided in the casing to form a pressure chamber together with the casing, and driven by a drive fluid from an outside of the actuator; and an annular seal member having a first fitting portion to be fitted into the first annular groove and a second fitting portion to be fitted into the second annular groove to seal the pressure chamber.
    Type: Grant
    Filed: January 3, 2020
    Date of Patent: March 1, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takeru Miura, Tsutomu Shinohara, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe, Kenta Kondo, Hidenobu Sato, Tomoko Yuhara
  • Publication number: 20220057002
    Abstract: A diaphragm valve includes: a valve body having flow paths of fluids formed therein and having a diaphragm-arrangement portion on one surface; a diaphragm arranged in the diaphragm-arrangement portion and can open and close the flow path and adjust the opening degree of by elastic deformation; and a driving unit having a stem for pressing the diaphragm to elastically deform and an actuator for driving the stem, wherein the stem is axially movably held via a resin sleeve by a bonnet fixed to the valve body side.
    Type: Application
    Filed: September 3, 2019
    Publication date: February 24, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kohei SHIGYOU, Takashi HIROSE
  • Patent number: 11255468
    Abstract: A gasket includes a thick portion providing a first face seal and a thin portion providing a second face seal. A fluid coupling has an annular gasket housing recess that includes a wide portion for housing the thick portion of the gasket and a narrow portion for housing the thin portion of the gasket.
    Type: Grant
    Filed: March 25, 2016
    Date of Patent: February 22, 2022
    Assignees: FUJIKIN INCORPORATED, TOKYO ELECTRON LIMITED
    Inventors: Keisuke Ishibashi, Tadayuki Yakushijin, Tsuyoshi Tanikawa, Michio Yamaji, Tsuneyuki Okabe
  • Patent number: 11255458
    Abstract: A valve device includes: a body having a substantially block shape in which first and second valve chambers are recessed from an upper surface, and three flow paths communicating with the first valve chamber and three flow paths communicating with the second valve chamber are formed inside the body; first and second valve members disposed in the first and second valve chambers, respectively, to switch between communication and disconnection between one of the three flow paths and the other two flow paths; and first and second actuators for respectively driving the first and second valve members, wherein the other two flow paths communicating with the each of valve chambers have respective ports on the lower surface of the body, while the one flow path has a common port on the lower surface of the body.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: February 22, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takahiro Matsuda, Kenji Aikawa, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi, Tomohiro Nakata, Tsutomu Shinohara
  • Patent number: 11242934
    Abstract: Provided is a valve device which can precisely adjust the flow rate while ensuring the flow rate of the fluid. A valve device includes a main actuator which receives a pressure of a supplied drive fluid and moves an operating member to an open position or closed position; an adjusting actuator arranged to receive at least a part of a force generated by the main actuator and for adjusting the position of the operating member positioned at the open position; and a pressure regulator provided in a feed path of the drive fluid to the main actuator and for regulating the pressure of the supplied drive fluid to suppress fluctuation of the pressure of the drive fluid supplied to the main actuator.
    Type: Grant
    Filed: March 9, 2018
    Date of Patent: February 8, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kenta Kondo, Toshihide Yoshida, Masahiko Takimoto, Tsutomu Shinohara, Tomohiro Nakata, Takeru Miura, Masahiko Nakazawa
  • Publication number: 20220034794
    Abstract: A concentration measuring device 100 comprises: a measurement cell 4 having a flow path, a light source 1, a photodetector 7 for detecting light emitted from the measurement cell, and an arithmetic circuit 8 for calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portion 3 fixed to the cell body so as to contact the flow path, and a reflective member 5 for reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell body 40 by a window holding member 30 via a gasket 15, an annular sealing protrusion 15a is provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusion 42a is also provided on a support surface 42 of the cell body for supporting the second surface opposite to the first surface of the gasket.
    Type: Application
    Filed: September 17, 2019
    Publication date: February 3, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki NAGASE, Kazuteru TANAKA, Keiji HIRAO, Tadayuki YAKUSHIJIN, Kouji NISHINO, Michio YAMAJI, Nobukazu IKEDA
  • Publication number: 20220025986
    Abstract: A fluid control device includes; upstream side and downstream side joint blocks defining a fluid flow path, and having engaging portions at a bottom surface side; a support member having a guide portion to which the engaging portions of the upstream side and downstream side joint blocks can be engaged; and a fluid device supported by the support member via the upstream side and the downstream side joint blocks; wherein the upstream side and the downstream side joint blocks are fixed to the guide portion by utilizing a reaction force against a bending force generated by the tightening force of fastening bolts to the upstream side and the downstream side joint blocks and the fluid device connected together, and the length of the engaging portions in the longitudinal direction of the joint blocks is formed shorter than the length of the joint blocks.
    Type: Application
    Filed: December 12, 2019
    Publication date: January 27, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Akihiro HARADA, Kenji AIKAWA
  • Patent number: 11231121
    Abstract: A first lever portion includes a first point-of-effort portion, a first fulcrum portion, and a first point-of-load portion. A second lever portion has a second point-of-effort portion, a second fulcrum portion, and a second point-of-load portion. A first point-of-effort portion is located between a first fulcrum portion and a first point-of-load portion in a direction orthogonal to an axis of a stem. A second fulcrum portion is located between a second point-of-effort portion and a second point-of-load portion in the direction orthogonal to the axis. A distance between the second fulcrum portion and the second point-of-load portion is configured longer than a distance between the second fulcrum portion and the second point-of-effort portion. The second point-of-load portion of the second lever portion is displaced toward the stem and moves the stem toward the piezoelectric element by means of displacement of the intermediate member to the second lever portion side.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: January 25, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takashi Hirose, Masahiko Nakazawa, Nobuo Nakamura, Tomoko Yuhara
  • Patent number: 11231026
    Abstract: A valve device includes valve elements each having a valve seat, a valve seat support, and a diaphragm provided so as to be able to abut on and separate from the seat surface of the valve seat, the diaphragm making the flow passage of the valve seat and the corresponding secondary flow path communicate through the gap between the diaphragm and the valve seat, and the valve seat support has seal surfaces that cooperate with a part of the inner wall surface of the corresponding accommodation recess to shut off the communication between the corresponding primary flow path and the secondary flow path, and a detour passage that connects the primary flow path and the flow passage of the valve seat, and the valve body defines a communication passage that makes the secondary flow paths communicates with each other.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: January 25, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara
  • Publication number: 20220019187
    Abstract: A work management apparatus, method, and system enable to accurately manage position, tightening torque and other information for all fastening parts, for tightening work using a tool with a torque sensor. The system includes: a driver provided with a torque sensor; and first and second cameras that capture images of a product from different viewpoints. The torque sensor starts measurement of the tightening torque when a detected tightening torque exceeds a set threshold value, stops measurement of the tightening torque when the measurement data satisfies a predetermined condition, and outputs torque related data that includes measurement time. The system further includes: a PC that calculates coordinates of an engagement position of a bit from a plurality of image data captured by the first and the second cameras corresponding to the measurement time included in the torque related data; and a marker mounting device provided with a marker and removably mounted to the bit.
    Type: Application
    Filed: November 25, 2019
    Publication date: January 20, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Yuto KAWAUCHI, Yuya SUZUKI, Ryutaro TANNO, Akihiro HARADA, Tsutomu SHINOHARA
  • Patent number: 11226049
    Abstract: A fluid supply system includes: a coupling manifold disposed in parallel to mutually facing end portions of the multiple-unit manifolds that are adjacent to each other; a first fluid control device connecting one of the end portions of the multiple-unit manifolds that are adjacent to each other to the coupling manifold; and a second fluid control device connecting the other one of the end portions of the multiple-unit manifolds that are adjacent to each other to the coupling manifold, in which the coupling manifold has a communication passage that establishes communication of combined flow passages of the multiple-unit manifolds that are adjacent to each other via the first and second fluid control devices.
    Type: Grant
    Filed: October 3, 2019
    Date of Patent: January 18, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Naoto Tagashira, Kouji Tsutsumi
  • Patent number: 11226043
    Abstract: A ball valve includes: a main body having a fluid inlet passage, a fluid outlet passage, and a column-shaped depression communicating with these passages and opening upward; a ball including a fluid communication passage and disposed at the column-shaped depression of the main body rotatably about a reference axis; an operating mechanism configured to cause the ball to rotate about the reference axis; a ball seat having a required opening on a peripheral wall thereof and disposed between the ball and the main body; a ball seat presser configured to press the ball seat; and a pressing screw configured to press the ball seat presser downward. The ball is rotated to achieve communication and cutoff. The ball seat has a substantially frustoconical shape having a bottom surface larger than a bottom of the depression in diameter, and an upper surface slightly smaller than the bottom surface in diameter.
    Type: Grant
    Filed: July 31, 2020
    Date of Patent: January 18, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Tomohiro Mouri, Koji Hiramatsu, Tadayuki Yakushijin