Abstract: A valve device includes: a flow path block in which a fluid inflow path and a fluid outflow path are formed; a diaphragm configured to open and close between the fluid inflow path and the fluid outflow path; and an actuator including a case, a piston accommodated in the case and having an air flow path formed therein, a stem configured to move the diaphragm to an open position or a closed position by moving integrally with the piston in an axial direction, an air introduction chamber surrounded by the case and the piston, and a one-touch joint configured to supply an air fluid to the air introduction chamber via the air flow path. The one-touch joint is coupled to the piston.

Abstract: A gas supply device capable of saving space and supplying a mixed gas having components with stable concentration to a processing chamber in a short time includes: a plurality of fluid control units each including a flow path through which gas flows, and fluid control devices provided in the middle of the flow path; a merging flow path including a plurality of connecting portions fluidly connected to the plurality of fluid control units and a single gas outlet portion which derives the gas introduced through the plurality of connecting portions; wherein a plurality of connecting portions is arranged symmetrically with respect to the gas outlet portion in the flow path direction of the merging flow path, and two or more fluid control units are fluidly connected to each of the plurality of connecting portions.

Abstract: The invention provides a valve capable of suppressing unintended valve opening/closing by providing a play state during a manual operation and also enabling smooth transition from the play state to a rotation state. In the valve, a tip of another end portion of the stem and the engagement hole of an operation handle form a corresponding circumferential surface and a planar section continuous to the circumferential surface. Either one of the tip of the other end portion of the stem and the planar section of the engagement hole of the operation handle is formed to have two flat surfaces defining a predetermined angle, and thereby generates predetermined play when the operation handle is rotated in one direction after being rotated in another direction.

Abstract: A diaphragm valve, which is miniaturized while ensuring a required flow rate and has improved assemble workability and maintainability, includes a body defining a flow path; a diaphragm provided on a bottom surface of an accommodation recess; a fixing ring screwed with a screw portion formed on an inner peripheral surface of the accommodation recess to fix the diaphragm to the body; a stacked piezoelectric actuator; a support plate supporting the stacked piezoelectric actuator; a cylindrical actuator cover holding a diaphragm presser and configured to transmit the piezoelectric displacement of the stacked piezoelectric actuator while accommodating the stacked piezoelectric actuator inside; and a fixing member screwed with the common screw portion and cooperating with the fixing ring to fix the position of the support plate in the accommodation recess.

Abstract: An object is to provide a joint in which a tapered portion of a body to which surface treatment has been applied is not seized when a pipe is attached. The joint includes a body having a tapered portion on an inner peripheral surface of at least one end portion, a threaded portion on an outer peripheral surface of the at least one end portion, and a flow path therein; a ring having a tapered outer peripheral surface in sliding contact with the tapered portion of the body; and a nut pushing the tapered outer peripheral surface of the ring against the tapered surface of the body by being screwed with a parallel threaded portion of the threaded portion of the body to which a pipe is connected and, in which surface treatment for preventing adsorption of liquid is applied to a surface of the body.

Abstract: A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.

Abstract: [Problem] An electrostatic capacitive pressure sensor capable of detecting a pressure of a fluid with high accuracy, capable of miniaturization, and having a wider pressure detection range, and a pressure detection method using the same. [Solution] The electrostatic capacitive pressure sensor comprises: a reference chamber provided between a fixed electrode and a movable electrode that deflects in accordance with fluid pressure; a measurement chamber filled with a fluid for causing deflection of the movable electrode; a means for sequentially applying a first potential and a second potential to the fixed electrode and generating a first output signal corresponding to the first potential and a second output signal corresponding to the second potential; and a means for generating a difference signal between the first output signal and the second output signal.

Abstract: The driving device includes a piezoelectric element, a power supply unit, a first resistor, a second resistor, a measuring unit and a control unit, wherein resistance values of the first resistor and the second resistor are smaller than an insulating resistance value of the piezoelectric element, the measuring unit measures, a voltage across the first resistor (voltage between a first terminal and a second terminal), in a state of supplying a predetermined voltage from the power supply unit, and the control unit calculates a resistance value of the piezoelectric element from a voltage value obtained by the measurement of the measuring unit, and determines, whether or not degradation has occurred in the piezoelectric element based on the calculated resistance value.

Abstract: A controller capable of improving the disappearance resistance of a synthetic resin coating of a diaphragm, and a vaporization supply device comprising the controller. The controller includes a body having an inflow passage and an outflow passage, a valve seat provided between the inflow passage and the outflow passage, a diaphragm capable of being seated on or separated from the valve seat, and an actuator for causing the diaphragm to be seated on and separated from the valve seat. The material of the valve seat is nickel-based, and the diaphragm is provided with a synthetic resin coating on a surface of a side to be brought into contact with the valve seat.

Abstract: An abnormality detection method is performed in a gas supply system including a flow rate control device having a restriction part, a control valve, a flow rate control pressure sensor for measuring upstream pressure, and a control circuit. The inflow pressure sensor measures the supply pressure. An upstream on/off valve is provided upstream of the inflow pressure sensor. The method includes closing the upstream on/off valve when the gas flows at a controlled flow rate at the downstream of the restriction part by controlling an opening degree of the control valve based on the output of the flow rate control pressure sensor; measuring a drop in supply pressure on the upstream side of the control valve after closing the upstream on/off valve while keeping the control valve open; and detecting the presence or absence of abnormality in the flow rate control device based on the measured supply pressure drop.

Abstract: A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. Further, a fluid leak abnormality is identified as a change accompanying an operation of the fluid control device and the fluid leaks is detected with high accuracy. A fluid control device, having a flow path and a closed space isolated from the flow path by a diaphragm and capable of detecting an abnormality, includes a pressure sensor detecting a pressure inside of the closed space, a processing module executing a predetermined information process, and an operation detecting mechanism detecting an operation of the fluid control device. The processing module executes a discriminating process discriminating abnormality of the fluid control device by comparing a detected value detected by the pressure sensor with a predetermined threshold value, and a correcting process correcting the predetermined threshold value in accordance with the operation of the fluid control device.

Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.

Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.

Abstract: A vaporization supply apparatus 1 includes a preheating section 2 for preheating a liquid raw material L, a vaporization section 3 provided on top of the preheating section 2 for heating and vaporizing the preheated liquid raw material L sent from the preheating section 2, a flow rate control device 4 provided on top of the vaporization section 3 for controlling the flow rate of a gas G sent from the vaporization section 3, and heaters 5 for heating the preheating section 2, the vaporization section 3 and the flow rate control device 4.

Abstract: A diaphragm valve includes a body (3) having a flow path (2), a seat (4) formed in the flow path (2), a metal diaphragm (5) for opening and closing the flow path (2), a pair of clamping parts (6) and (7) for claiming peripheral edge portions of the metal diaphragm (5) to fix the metal diaphragm (5) to the body (3), and an actuator (8) for abutting the metal diaphragm (5) to the seat (4) or separating the metal diaphragm from the seat (4), wherein a fluorine resin coating is formed on a seat side surface (5a) of the metal diaphragm (5) at least in a contact region (B-A) with the seat (4) in a region (C) surrounded by a clamping region (D-C) between the seat side surface (5a) and one of the pair of clamping portions (6, 7), excluding the clamping region (D-C).

Abstract: An entire fluid supply line or an entire fluid controller constituted by a plurality of fluid control devices is precisely monitored. A fluid controller G accumulating and having a plurality of fluid control devices A. The fluid control devices A include an operation information acquisition mechanism acquiring an operation information in the fluid control devices, an identification information storage 71 storing a self-identification information, and a communication processing unit 72 transmitting the operation information acquired by the operation information acquisition mechanism to an external terminal with the self-identification information stored in the identification information storage 71 at different timings for each of the fluid control devices A.

Abstract: A vaporizer 10 comprises: a vaporization chamber 12 for storing a liquid; a bottom heater 14B provided in the vaporization chamber 12 which includes a winding portion 141, acting as a heat source, to contact with the liquid stored in the vaporization chamber and an upright portion 142 erected from the winding portion and having an end portion with a heater terminal 143; and a relief valve 16 connected to the vaporization chamber 12. The vaporizer 10 is configured to be able to appropriately vaporize and supply ultrapure water.

Abstract: The pressure sensor 10 comprises: a bottomed cylindrical sensor module 11 having inside a pressure receiving chamber C1 communicating with a flow path and including a diaphragm 11a in contact with the pressure receiving chamber; a pressure detecting element 12 for outputting a strain of the diaphragm 11a as a pressure; a base ring 14 fixed at an outer edge of an open-side end part 11c of the sensor module and disposed on an outer peripheral side of the sensor module 11; a hermetic member 13 fixed to the base ring 14 for forming a sealed vacuum chamber C2 opposite to the pressure receiving chamber C1 across the diaphragm 11a; a gasket 18 sandwiched between the base ring 14 and a body 5; and a pressing flange 19 for pressing the base ring 14 to the body 5 through the gasket 18.

Abstract: A diaphragm valve includes a valve body that defines a flow path through which fluid flows and an opening that opens to the outside in a middle of flow path; a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path; and a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member. A housing is fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member. A humidity sensor that detects a state of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing. The diaphragm valve is capable of preventing fluid in a diaphragm valve from leaking to the outside due to breakage of a diaphragm.

Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.