Patents Assigned to Fujikin Incorporated
  • Publication number: 20240167577
    Abstract: A controller capable of improving the disappearance resistance of a synthetic resin coating of a diaphragm, and a vaporization supply device comprising the controller. The controller includes a body having an inflow passage and an outflow passage, a valve seat provided between the inflow passage and the outflow passage, a diaphragm capable of being seated on or separated from the valve seat, and an actuator for causing the diaphragm to be seated on and separated from the valve seat. The material of the valve seat is nickel-based, and the diaphragm is provided with a synthetic resin coating on a surface of a side to be brought into contact with the valve seat.
    Type: Application
    Filed: March 8, 2022
    Publication date: May 23, 2024
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Kazuteru TANAKA, Takatoshi NAKATANI, Kazuyuki MORISAKI, Masafumi KITANO, Kaoru HIRATA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA
  • Patent number: 11988302
    Abstract: A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. Further, a fluid leak abnormality is identified as a change accompanying an operation of the fluid control device and the fluid leaks is detected with high accuracy. A fluid control device, having a flow path and a closed space isolated from the flow path by a diaphragm and capable of detecting an abnormality, includes a pressure sensor detecting a pressure inside of the closed space, a processing module executing a predetermined information process, and an operation detecting mechanism detecting an operation of the fluid control device. The processing module executes a discriminating process discriminating abnormality of the fluid control device by comparing a detected value detected by the pressure sensor with a predetermined threshold value, and a correcting process correcting the predetermined threshold value in accordance with the operation of the fluid control device.
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: May 21, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Ryutaro Tanno, Tsutomu Shinohara, Yuya Suzuki, Hidenori Kiso
  • Patent number: 11988543
    Abstract: An abnormality detection method is performed in a gas supply system including a flow rate control device having a restriction part, a control valve, a flow rate control pressure sensor for measuring upstream pressure, and a control circuit. The inflow pressure sensor measures the supply pressure. An upstream on/off valve is provided upstream of the inflow pressure sensor. The method includes closing the upstream on/off valve when the gas flows at a controlled flow rate at the downstream of the restriction part by controlling an opening degree of the control valve based on the output of the flow rate control pressure sensor; measuring a drop in supply pressure on the upstream side of the control valve after closing the upstream on/off valve while keeping the control valve open; and detecting the presence or absence of abnormality in the flow rate control device based on the measured supply pressure drop.
    Type: Grant
    Filed: November 26, 2020
    Date of Patent: May 21, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Atsushi Hidaka, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda, Kaoru Hirata
  • Publication number: 20240160230
    Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.
    Type: Application
    Filed: January 22, 2024
    Publication date: May 16, 2024
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kaoru HIRATA, Keisuke IDEGUCHI, Shinya OGAWA, Katsuyuki SUGITA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA, Hiroyuki ITO
  • Publication number: 20240151319
    Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.
    Type: Application
    Filed: December 1, 2023
    Publication date: May 9, 2024
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masahiko TAKIMOTO, Toshihide YOSHIDA, Tsutomu SHINOHARA, Kouji NISHINO
  • Patent number: 11976748
    Abstract: A diaphragm valve includes a body (3) having a flow path (2), a seat (4) formed in the flow path (2), a metal diaphragm (5) for opening and closing the flow path (2), a pair of clamping parts (6) and (7) for claiming peripheral edge portions of the metal diaphragm (5) to fix the metal diaphragm (5) to the body (3), and an actuator (8) for abutting the metal diaphragm (5) to the seat (4) or separating the metal diaphragm from the seat (4), wherein a fluorine resin coating is formed on a seat side surface (5a) of the metal diaphragm (5) at least in a contact region (B-A) with the seat (4) in a region (C) surrounded by a clamping region (D-C) between the seat side surface (5a) and one of the pair of clamping portions (6, 7), excluding the clamping region (D-C).
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: May 7, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kaoru Hirata, Masaaki Nagase, Atsushi Hidaka, Kazuyuki Morisaki, Keisuke Ideguchi, Kosuke Sugimoto, Masafumi Kitano, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 11976356
    Abstract: A vaporization supply apparatus 1 includes a preheating section 2 for preheating a liquid raw material L, a vaporization section 3 provided on top of the preheating section 2 for heating and vaporizing the preheated liquid raw material L sent from the preheating section 2, a flow rate control device 4 provided on top of the vaporization section 3 for controlling the flow rate of a gas G sent from the vaporization section 3, and heaters 5 for heating the preheating section 2, the vaporization section 3 and the flow rate control device 4.
    Type: Grant
    Filed: September 3, 2020
    Date of Patent: May 7, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takatoshi Nakatani, Atsushi Hidaka, Ichiro Tokuda, Keisuke Nakatsuji
  • Patent number: 11960308
    Abstract: An entire fluid supply line or an entire fluid controller constituted by a plurality of fluid control devices is precisely monitored. A fluid controller G accumulating and having a plurality of fluid control devices A. The fluid control devices A include an operation information acquisition mechanism acquiring an operation information in the fluid control devices, an identification information storage 71 storing a self-identification information, and a communication processing unit 72 transmitting the operation information acquired by the operation information acquisition mechanism to an external terminal with the self-identification information stored in the identification information storage 71 at different timings for each of the fluid control devices A.
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: April 16, 2024
    Assignee: Fujikin, Incorporated
    Inventors: Ryutaro Tanno, Tsutomu Shinohara, Yuya Suzuki, Hidenori Kiso
  • Publication number: 20240101446
    Abstract: A vaporizer 10 comprises: a vaporization chamber 12 for storing a liquid; a bottom heater 14B provided in the vaporization chamber 12 which includes a winding portion 141, acting as a heat source, to contact with the liquid stored in the vaporization chamber and an upright portion 142 erected from the winding portion and having an end portion with a heater terminal 143; and a relief valve 16 connected to the vaporization chamber 12. The vaporizer 10 is configured to be able to appropriately vaporize and supply ultrapure water.
    Type: Application
    Filed: February 1, 2022
    Publication date: March 28, 2024
    Applicant: FUJIKIN INCORPORATED
    Inventors: Ichiro TOKUDA, Mizuki NAKAGAWA, Keiji HIRAO, Yukio MINAMI
  • Publication number: 20240094078
    Abstract: The pressure sensor 10 comprises: a bottomed cylindrical sensor module 11 having inside a pressure receiving chamber C1 communicating with a flow path and including a diaphragm 11a in contact with the pressure receiving chamber; a pressure detecting element 12 for outputting a strain of the diaphragm 11a as a pressure; a base ring 14 fixed at an outer edge of an open-side end part 11c of the sensor module and disposed on an outer peripheral side of the sensor module 11; a hermetic member 13 fixed to the base ring 14 for forming a sealed vacuum chamber C2 opposite to the pressure receiving chamber C1 across the diaphragm 11a; a gasket 18 sandwiched between the base ring 14 and a body 5; and a pressing flange 19 for pressing the base ring 14 to the body 5 through the gasket 18.
    Type: Application
    Filed: November 2, 2021
    Publication date: March 21, 2024
    Applicants: FUJIKIN INCORPORATED, NIDEC COPAL ELECTRONICS CORPORATION
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Kaoru HIRATA, Kouji NISHINO, Nobukazu IKEDA, Masaki FUKASAWA
  • Patent number: 11927280
    Abstract: A diaphragm valve includes a valve body that defines a flow path through which fluid flows and an opening that opens to the outside in a middle of flow path; a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path; and a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member. A housing is fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member. A humidity sensor that detects a state of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing. The diaphragm valve is capable of preventing fluid in a diaphragm valve from leaking to the outside due to breakage of a diaphragm.
    Type: Grant
    Filed: May 17, 2019
    Date of Patent: March 12, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Yuya Suzuki, Ryutaro Tanno, Daihi Tsuchiguchi, Nobuo Nakamura, Tsutomu Shinohara
  • Patent number: 11914407
    Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.
    Type: Grant
    Filed: April 16, 2020
    Date of Patent: February 27, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kaoru Hirata, Keisuke Ideguchi, Shinya Ogawa, Katsuyuki Sugita, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda, Hiroyuki Ito
  • Patent number: 11906062
    Abstract: A fluid control device includes; upstream side and downstream side joint blocks defining a fluid flow path, and having engaging portions at a bottom surface side; a support member having a guide portion to which the engaging portions of the upstream side and downstream side joint blocks can be engaged; and a fluid device supported by the support member via the upstream side and the downstream side joint blocks; wherein the upstream side and the downstream side joint blocks are fixed to the guide portion by utilizing a reaction force against a bending force generated by the tightening force of fastening bolts to the upstream side and the downstream side joint blocks and the fluid device connected together, and the length of the engaging portions in the longitudinal direction of the joint blocks is formed shorter than the length of the joint blocks.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: February 20, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Akihiro Harada, Kenji Aikawa
  • Patent number: 11892100
    Abstract: A diaphragm valve including: a valve body having a flow path formed therein and a valve chamber recessed from an upper surface of the valve body; a diaphragm that is disposed in the valve chamber and elastically deformable to open and close the flow path and adjust an opening degree of the flow path; a stem for pressing the diaphragm to elastically deform the diaphragm; an actuator for driving the stem; a support mechanism that is fixed to the valve body and supports the stem and the actuator; wherein the stem includes a first stem member connected to the actuator via a displacement transmitting member, and a second stem member held by the support mechanism so as to be movable in the axial direction via a sleeve, the second stem member has an upper end portion which abuts against a lower end portion of the first stem member.
    Type: Grant
    Filed: December 7, 2020
    Date of Patent: February 6, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kohei Shigyou, Takashi Hirose
  • Patent number: 11879560
    Abstract: A flow-path forming block includes: a first block; a second block attached to the first block, the second block having a first flow path and a second flow path; and a gasket provided between the first block and the second block, the gasket being configured to seal between the first block and the second block, wherein the second block has a communication portion formed on a surface facing the gasket, the communication portion being configured such that the first flow path and the second flow path are communicated, and the gasket has a recessed portion formed at a position facing the communication portion.
    Type: Grant
    Filed: February 18, 2020
    Date of Patent: January 23, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kazunari Watanabe, Kenji Aikawa, Kohei Shigyou, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara
  • Publication number: 20240019045
    Abstract: To provide a valve that is easily assembled and has a low possibility of breakage of a coupled section even when the valve has to be downsized or subjected to a large load. A valve has a valve unit and a drive unit, is configured to include: a first recess that is a recess formed in either one of a second stem or a first stem and is formed with a groove at a predetermined position on an inner circumferential surface of the recess; a second recess formed in another one thereof; a stem pin accommodated in both of the recesses; an urging member that is accommodated in the first recess and urges the stem pin to the other side; a sidewall through-hole that penetrates a sidewall of the second recess horizontally; and a ball that enters the sidewall through-hole.
    Type: Application
    Filed: August 26, 2021
    Publication date: January 18, 2024
    Applicant: FUJIKIN INCORPORATED
    Inventors: Souta Hachiman, Keisuke Ishibashi, Tadayuki Yakushijin, Yusei Horikawa, Michio Yamaji
  • Patent number: 11873916
    Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.
    Type: Grant
    Filed: June 15, 2021
    Date of Patent: January 16, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masahiko Takimoto, Toshihide Yoshida, Tsutomu Shinohara, Kouji Nishino
  • Patent number: 11859733
    Abstract: A valve device comprising: a flow passage block in which a flow passage is formed; a diaphragm configured to open and close the flow passage; an actuator configured to push down the diaphragm via a diaphragm holder; a tubular bonnet formed with an internal thread on an inner circumferential surface, the bonnet being configured to join the flow passage block and the actuator; a tubular adjusting screw threaded to the internal thread, the adjusting screw being configured to come into contact with the diaphragm holder to adjust a valve opening position of the diaphragm; and an annular lock nut configured to lock the adjusting screw by being screwed into the internal thread.
    Type: Grant
    Filed: June 10, 2020
    Date of Patent: January 2, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Akihiro Harada, Tomohiro Nakata, Takeru Miura, Michio Yamaji, Tadayuki Yakushijin, Keisuke Ishibashi
  • Publication number: 20230400114
    Abstract: [Problem] The main purpose of the present invention is to provide a casing for a fluid controller capable of enabling maintenance inside the casing even in a state where the lower part of the casing is fixed to a main body of a fluid controller, and improving maintainability. [Solution] A casing 1 for covering devices 104,106,108 on a main body 101 of a fluid controller 100, the casing 1 is configured so as to be dividable into a plurality of parts, and the plurality of parts comprising a first part 2 provided with a fixing portion 2i for fixing to the main body 101, a second part 4 attached to the first part 2, and a third part 5 attachably and detachably provided at an upper partition higher than a predetermined height position of the casing 1.
    Type: Application
    Filed: October 18, 2021
    Publication date: December 14, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Atsushi HIDAKA, Takatoshi NAKATANI, Kazuyuki MORISAKI, Tomokazu HIROTA, Kouji NISHINO, Nobukazu IKEDA
  • Publication number: 20230392741
    Abstract: Provided is a closing plug capable of easily closing an open end of a flow passage without concern of scale. The closing plug includes: a gasket configured to come into contact with an annular projection formed in a step portion inside the open end of the flow passage of a flow passage block; a columnar pressing member formed by cutting out an inner side of a pressing surface so as to press a peripheral edge portion of the gasket; and a closing plug screw configured to be screwed into a female screw formed in an inner peripheral surface on an open end side from the step portion and press the pressing member toward the gasket by movement caused by screwing.
    Type: Application
    Filed: August 16, 2021
    Publication date: December 7, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Ichiro Tokuda, Tsuyoshi Tanikawa, Yukio Minami