Patents Assigned to Fujikin Incorporated
  • Patent number: 10976240
    Abstract: A concentration measurement device for measuring the concentration of a measured fluid within a measurement cell by detecting transmitted light that has passed through the measurement cell having a light incidence window and a light emission window disposed opposing to each other, comprising a reflected-light detector for detecting reflected light of the light incidence window.
    Type: Grant
    Filed: August 9, 2016
    Date of Patent: April 13, 2021
    Assignees: TOKUSHIMA UNIVERSITY, FUJIKIN INCORPORATED
    Inventors: Yoshihiro Deguchi, Masaaki Nagase, Michio Yamaji, Nobukazu Ikeda, Kouji Nishino, Masayoshi Kawashima, Kazuteru Tanaka
  • Publication number: 20210102636
    Abstract: A valve device is provided that is a gas-driven type, is capable of mounting various electronic devices, and solves problems involving wiring or battery replacement. The problem is solved by a valve device including a piston member that drives a diaphragm, an actuator part that receives supply of high-pressure air and drives the piston member, a coil spring that presses the piston member in a direction reverse to a driving direction of the actuator part, and a power generation unit provided in a power generation unit-housing part serving as a supply path of high-pressure air to the actuator part and including a screw rotated by air flow and a commutator generator coupled with the screw. The power generation unit generates power using the high-pressure air supplied to the actuator part and a portion of energy stored in the coil spring.
    Type: Application
    Filed: March 14, 2018
    Publication date: April 8, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Toshiyuki SAKAMOTO, Hidehiro DOYA
  • Publication number: 20210102633
    Abstract: A fluid control device is provided in which a temperature sensor is firmly fixed and the thermal contact of the temperature sensor with the inner circumferential surface of a leak port is reliably maintained. A fluid control device 3 holding a temperature sensor 7 has the temperature sensor 7 inserted into a leak port LP and a sensor holding member 8 provided directly above the leak port LP and holding the temperature sensor 7 in a state in which the temperature sensor 7 is inserted into the inside of the leak port LP. The sensor holding member 8 is formed of a base body part 81 disposed directly above the leak port LP and a through hole 8a provided on the base body part 81, the temperature sensor 7 being inserted into the through hole 8a, the through hole 8a communicating with the leak port LP. The base body part 81 has a length that fits in the width of the fluid control device 3 in the short-side direction. The through hole 8a of the sensor holding member 8 and the leak port LP form a predetermined angle.
    Type: Application
    Filed: March 22, 2018
    Publication date: April 8, 2021
    Applicant: Fujikin Incorporated
    Inventors: Kazuhiro Fujine, Hidehiro Doya
  • Patent number: 10969259
    Abstract: In a method of calibrating a flow rate control device in which a flow rate is calibrated based on comparison with a flow rate measured by a flow rate reference gauge, a predetermined permissible error range is set for a plurality of flow rate settings, and the permissible error range of at least one specific flow rate setting among the plurality of flow rate settings is set to be smaller than the predetermined permissible error range.
    Type: Grant
    Filed: June 22, 2017
    Date of Patent: April 6, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Yohei Sawada, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 10962513
    Abstract: A method for detecting the concentration of a specified gas contained in a mixed gas includes, in a pressure-type flow rate control device including a restriction portion, an upstream valve provided upstream of the restriction portion, and a pressure sensor for measuring the pressure between the restriction portion and the upstream valve, a step of flowing the mixed gas from the upstream side of the upstream valve in a state in which the pressure on the downstream side of the restriction portion is lower than the pressure on the upstream side of the restriction portion, a step of determining with a pressure sensor pressure drop characteristics occurring after the upstream valve is changed from an open to a closed state, and a step of determining the concentration of the specified gas in the mixed gas based on the pressure drop characteristics.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: March 30, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kenji Aikawa, Kaoru Hirata, Takahiro Imai, Tetsuo Naritomi, Tsutomu Shinohara, Takahiro Matsuda, Kouji Nishino
  • Patent number: 10928813
    Abstract: A pressure-type flow rate control device includes a restriction part, a control valve disposed upstream of the restriction part, an upstream pressure sensor, a downstream pressure sensor, and a controller that diagnoses flow rate control by using pressure drop data on a flow passage between the control valve and the restriction part and reference pressure drop data, wherein a close command is issued to the control valve and a shutoff valve provided downstream of the downstream pressure sensor, and the controller determines whether a predetermined critical expansion condition is satisfied by using outputs of the upstream pressure sensor and the downstream pressure sensor after the control valve is closed, and diagnoses flow rate control by using the pressure drop data acquired during a period in which the predetermined critical expansion condition is satisfied.
    Type: Grant
    Filed: March 23, 2017
    Date of Patent: February 23, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kaoru Hirata, Yohei Sawada, Katsuyuki Sugita, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 10928303
    Abstract: A concentration measuring device includes a measuring cell having a flow passage and a translucent window, a light source for emitting light to the measuring cell through the window, a reflective member for reflecting light propagating through the measuring cell to the window, a light detector for detecting the light exiting from the window, a calculation part for calculating the concentration of the fluid on the basis of a detection signal from the light detector, and an optical device for guiding the light from the light source to the window and guiding the light from the window to the light detector.
    Type: Grant
    Filed: July 25, 2017
    Date of Patent: February 23, 2021
    Assignees: TOKUSHIMA UNIVERSITY, FUJIKIN INCORPORATED
    Inventors: Yoshihiro Deguchi, Takashi Fukawa, Taiki Hattori, Masaaki Nagase, Kazuteru Tanaka, Kouji Nishino, Nobukazu Ikeda
  • Publication number: 20210018103
    Abstract: A diaphragm valve configured to allow for adjustment of a Cv value during assembly of the diaphragm valve is provided. A valve body, a diaphragm, an actuator, a bonnet, a stem, and a diaphragm holder are provided, the bonnet includes a through hole coaxial with the stem and formed with a female thread, the cylindrical body formed with a male thread on an outer surface is screwed into the through hole in engagement with the female thread, the stem is inserted into the cylindrical body, a diaphragm side end surface of the cylindrical body protrudes from an opening surface of the through hole on the diaphragm side toward a diaphragm, a stem side end surface of the diaphragm holder comes into abutment with the diaphragm side end surface of the cylindrical body, so that a position of the abutted surfaces in an axial direction of the stem is adjusted by a degree of adjustment between the male thread and the female thread.
    Type: Application
    Filed: September 17, 2019
    Publication date: January 21, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Tadayuki Yakushijin, Keisuke Ishibashi, Michio Yamaji, Akihiro Harada
  • Patent number: 10895329
    Abstract: Provided is a fluid control system including upstream-side and downstream-side base blocks, each defining a flow path provided with flow path ports, including a screw hole and a screw hole formed between the two flow path ports in longitudinal directions, and coupling to the upstream-side and downstream-side base blocks and a body of a fluid device by tightening bolts. End portions of the upstream-side and downstream-side base blocks are coupled to each other by the tightening bolts.
    Type: Grant
    Filed: September 7, 2017
    Date of Patent: January 19, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Hidehiro Doya, Masaru Sato
  • Patent number: 10895484
    Abstract: A gas supply system capable of flow measurement includes a flow controller that controls the flow rate of a flowing gas, a first shutoff valve provided downstream of the flow controller, a second shutoff valve provided in a first flow passage communicating with the downstream side of the first shutoff valve, a second flow passage that branches from the first flow passage, a third shutoff valve provided in the second flow passage, a pressure sensing device that detects a pressure in a flow passage controlled by the first, second, and third shutoff valves, a temperature sensing device that detects a temperature in the flow passage controlled by the first, second, and third shutoff valves, a volume measuring tank connected downstream of the third shutoff valve and having a known volume, and an arithmetic and control unit that obtains a passage volume controlled by the first, second, and third shutoff valves by applying Boyle's law to open and closed states of the third shutoff valve and calculates the flow rate
    Type: Grant
    Filed: January 12, 2017
    Date of Patent: January 19, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Yohei Sawada, Nobukazu Ikeda, Kouji Nishino, Masaaki Nagase
  • Patent number: 10895482
    Abstract: To provide an MFC capable of improving an S/N ratio of a sensor signal even when a pressure difference between both sides of the MFC is small and a flow rate in the sensor flow path is low. Provided is a mass flow controller including a fluid flow path that allows a fluid to pass therethrough, a plurality of flow sensor units that measure a mass flow rate of the fluid, an adjusting valve that adjusts a flow rate of the fluid passing through the fluid flow path, and a control unit that controls a degree of open of the adjusting valve. The flow sensor units are each a thermal flow sensor unit. The control unit calculates a mass flow rate from an added output signal obtained by adding the output signals of the plurality of flow sensor units, and controls the degree of open of the adjusting valve.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: January 19, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takuro Murata, Takeshi Nakamura
  • Patent number: 10883866
    Abstract: The pressure-type flow rate control device includes: a restriction part interposed in a flow channel; an upstream-side pressure sensor detecting a fluid pressure on the upstream side of the restriction part; a downstream-side pressure sensor detecting a fluid pressure on the downstream side of the restriction part; a flow control valve provided in the flow channel on the upstream side of the upstream-side pressure sensor; and computation control circuit controlling the flow control valve based on detected values of the upstream-side pressure sensor and the downstream-side pressure sensor, thereby controlling the flow. Under conditions where no fluid flow occurs in the flow channel, the computation control circuit computes the difference between the detected value of the upstream-side pressure sensor and the detected value of the downstream-side pressure sensor, and outputs a signal for pressure sensor malfunction determination based on the computed difference.
    Type: Grant
    Filed: September 15, 2016
    Date of Patent: January 5, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Katsuyuki Sugita, Kouji Nishino, Kaoru Hirata, Masahiko Takimoto, Nobukazu Ikeda
  • Patent number: 10884435
    Abstract: A pressure-type flow rate control device 1, while maintaining an upstream pressure P1 of an orifice 5 at approximately at least twice a downstream pressure P2, calculates a flow factor FF of a mixed gas consisting of two types of gases mixed at a mixture ratio of X:(1?X) by FF=(k/?){2/(?+1)}1/(??1)[?/{(?+1)R}]1/2 using an average density ?, an average specific heat ratio ?, and an average gas constant R of the mixed gas that are calculated by weighting the densities, specific heat ratios, and gas constants of the two types of gases at the mixture ratio, and calculates a flow rate Q of the mixed gas passing through the orifice by Q=FF·S·P1(1/T1)1/2, where S is the orifice cross section, and P1 and T1 are respectively the pressure and temperature of the mixed gas on the upstream side of the orifice.
    Type: Grant
    Filed: August 24, 2017
    Date of Patent: January 5, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kaoru Hirata, Kouji Nishino, Nobukazu Ikeda
  • Patent number: 10884436
    Abstract: A flow rate signal correction method applicable to a pressure-type flow rate control device that controls a flow rate by controlling pressure existing upstream of a restriction part includes a step of generating a primary signal indicating the flow rate in accordance with an output of a pressure sensor provided upstream of the restriction part and a step of generating a secondary signal as a corrected signal of the primary signal such that the current value of the primary signal and a value including information regarding one or a plurality of past values of the primary signal are used to derive a current value corrected according to a predetermined relational expression. The secondary signal is output as a flow rate signal during a stable flow rate period, and the secondary signal is not output as a flow rate signal during a transient change period.
    Type: Grant
    Filed: October 24, 2016
    Date of Patent: January 5, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Katsuyuki Sugita, Nobukazu Ikeda, Kouji Nishino, Kaoru Hirata, Masahiko Takimoto, Masayoshi Kawashima, Takahiro Imai
  • Publication number: 20200401780
    Abstract: A fingerprint sensor for a display device capable of suppressing loss of light due to diffraction of light and a display device with this fingerprint sensor are provided. A fingerprint sensor for a display device having a plurality of photosensors arranged in a matrix, each of the photosensors has a semiconductor film for converting incident light into an electric signal, and a bottom gate electrode as a light shielding film arranged on a lower layer side of the semiconductor film for blocking incident light from the lower layer side to the semiconductor film, wherein the bottom gate electrode has four corner portions in an outer contour shape in a top view, and each of the corner portions is rounded.
    Type: Application
    Filed: November 26, 2018
    Publication date: December 24, 2020
    Applicants: CONNECTEC JAPAN Corporation, FUJIKIN INCORPORATED
    Inventors: Hiroshi KOMATSU, Akane SUZUKI, Jun KIMURA, Kensuke KOJIMA
  • Publication number: 20200393051
    Abstract: Provided is a valve device which can precisely adjust the flow rate while ensuring the flow rate of the fluid. A valve device includes a main actuator which receives a pressure of a supplied drive fluid and moves an operating member to an open position or closed position; an adjusting actuator arranged to receive at least a part of a force generated by the main actuator and for adjusting the position of the operating member positioned at the open position; and a pressure regulator provided in a feed path of the drive fluid to the main actuator and for regulating the pressure of the supplied drive fluid to suppress fluctuation of the pressure of the drive fluid supplied to the main actuator.
    Type: Application
    Filed: March 9, 2018
    Publication date: December 17, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenta KONDO, Toshihide YOSHIDA, Masahiko TAKIMOTO, Tsutomu SHINOHARA, Tomohiro NAKATA, Takeru MIURA, Masahiko NAKAZAWA
  • Publication number: 20200393060
    Abstract: To enable accurate and simple diagnosis of an operation abnormality of a valve. A valve V1 capable of detecting an operation abnormality has a magnet M1 that is attached in the vicinity of a pressing adapter 52 of a stem 53 that slides according to an opening/closing operation of the valve V1, and a magnetic sensor M2 that is attached to a surface acing the stem 53, inside the pressing adapter 52 that presses a peripheral edge of a diaphragm 51, and detects a change in a distance between the magnet M1 and the magnetic sensor M2. Further, an abnormality determination mechanism compares the change in the distance between the magnet M1 and the magnetic sensor M2 at the time of abnormality diagnosis detected by the magnetic sensor M2 and a previously measured change in the distance between the magnet M and the magnetic sensor M2 at the time of normality, and determines whether or not there is an abnormality.
    Type: Application
    Filed: October 5, 2018
    Publication date: December 17, 2020
    Applicant: Fujikin Incorporated
    Inventors: Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana, Masahiko Ochiishi, Tsutomu Shinohara
  • Publication number: 20200386342
    Abstract: A valve device allows simple flow rate control when the bulb is opened. Valve device includes: a valve body having a first flow path and a second flow path formed therein; a valve body for closing an opening of the first flow path to shut off a gateway between the first flow path and the second flow path and for opening the first flow path to communicate the first flow path and the second flow path; an operating member for moving between a closed position for closing the opening in the valve body and an open position for opening the opening; and an adjusting actuator for defining an open position of the operating member and having an electrically driven material made of a compound that deforms in response to a change in an electric field, and for changing the defined open position by deformation of the electrically driven material.
    Type: Application
    Filed: March 9, 2018
    Publication date: December 10, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Toshihide YOSHIDA, Tsutomu SHINOHARA, Tomohiro NAKATA, Ryutaro TANNO, Kouji NISHINO, Katsuyuki SUGITA, Masahiko TAKIMOTO
  • Publication number: 20200370671
    Abstract: A control device for a valve device can detect open/close state of the valve device without using limit switches. The valve device includes a diaphragm for opening and closing a flow path for flowing a fluid, a coil spring for biasing the diaphragm in the closing direction of flow path, a main actuator for driving it against the biasing force of the coil spring, and an adjusting actuator using a piezoelectric element for adjusting the opening degree of the flow path determined by the diaphragm. The controller detects the open/close state of flow path based on the voltage generated by the piezoelectric element of the adjusting actuator, and controls valve device using the detection signal.
    Type: Application
    Filed: November 12, 2018
    Publication date: November 26, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masahiko TAKIMOTO, Toshihide YOSHIDA, Kenta KONDO, Ryousuke DOHI, Kouji NISHINO
  • Publication number: 20200370664
    Abstract: Provided is a valve device in which influence of a physical impact on a valve element is further reduced. Valve device includes a valve seat disposed around an opening connected to a flow path formed in a valve body, a diaphragm for opening and closing flow path by moving between a contact position and a non-contact position with respect to the valve seat, a presser adapter that contacts a peripheral portion of the diaphragm, a casing that incorporates an actuator for actuating the diaphragm and is fixed on the valve body by being screwed into a screw hole formed in the valve body, and an adapter fixing ring that is screwed into the screw hole and thereby fixed in the valve body while pressing the presser adapter and the diaphragm.
    Type: Application
    Filed: February 19, 2019
    Publication date: November 26, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kazunari WATANABE, Kohei SHIGYOU, Yohei SAWADA, Tomohiro NAKATA, Tsutomu SHINOHARA