Abstract: Provided is a valve with which a seal member is not damaged when pressure accumulated near the seal member is released. This valve includes a valve box having a valve chamber, a valve seat provided in the valve chamber and having a seat surface, a stem including, at a tip end thereof, a valve element configured to abut against and move away from the seat surface due to an operation of an actuator, a seal space provided with a seal member configured to prevent a fluid from leaking, a seal opening space formed outside the seal space, and a seal pressing member configured to press and fix the seal member to a valve chamber side. The valve box is formed with a leak hole through which the seal space and the outside of the valve box communicate.

Abstract: To provide a driving device including a piezoelectric element deterioration detection circuit and a deterioration detection method that enable detection of deterioration of the piezoelectric element used in the driving device, without stopping a normal operation of the driving device.

Abstract: [Problem] To provide a valve system capable of monitoring in real time a mass of gas supplied from a valve that is periodically opened and closed, and that is capable of adjusting the output mass of gas supplied from the valve to be close to a target mass. [Solution] The valve system operates a main actuator 60 to make a diaphragm periodically open and close a flow path (step S2), calculate an output mass of fluid that passes through the a between the diaphragm and a valve seat and output from the diaphragm valve based on displacement data detected by a displacement sensor (step S3), determines an adjustment lift amount based on the calculated output mass, and adjusts a lift amount Lf of the diaphragm 20 by the determined adjustment lift amount (step S4).

Abstract: A flow rate control device (8) includes a control valve (6) having a valve element and a piezoelectric element for moving the valve element, and an arithmetic processing circuit (7) for controlling an operation of the control valve, wherein the arithmetic processing circuit is configured to receive an external command signal SE corresponding to a target flow rate when opening the control valve from a closed state so that a gas flows at the target flow rate, and to generate an internal command signal E1 output to a driving circuit for determining a voltage applied to the piezoelectric element based on the external command signal, the internal command signal is a signal that rises with time from zero and converges to a value of the external command signal, and is generated such that a slope at the time of initial rise and a slope immediately before convergence are smaller than a slope therebetween.

Abstract: A concentration measurement method performed in a concentration measurement device including an electric unit having a light source and a photodetector, a fluid unit having a measurement cell through which a gas flows, and a processing circuit for calculating a concentration of the gas based on an intensity of a light passing through the measurement cell. The concentration measurement method includes a step of determining an absorption coefficient of the measurement gas using a reference absorption coefficient determined in association with the reference gas and a correction factor associated with the measurement gas, and a step of obtaining a concentration of the measurement gas flowing in the measurement cell using the absorption coefficient of the measurement gas.

Abstract: A gas supply amount measurement method is performed in a gas supply system including a vaporization section, a control valve provided downstream of the vaporization section, and a supply pressure sensor for measuring the supply pressure between the vaporization section and the control valve. The method comprises: a step of measuring an initial supply pressure by the supply pressure sensor in a state where the control valve is closed; a step of opening the control valve for only a predetermined time; a step of measuring for a plurality of times of the supply pressure in a period of time between a time at which the pressure starts to fall from the initial supply pressure and a time at which a predetermined time has elapsed when the control valve is open for only a predetermined time, and a step of determining the gas supply amount when the control valve is open for only a predetermined time by calculation based on the measured values of the plurality of supply pressures.

Abstract: A concentration measuring device 100 comprises: a measurement cell 4 having a flow path, a light source 1, a photodetector 7 for detecting light emitted from the measurement cell, and an arithmetic circuit 8 for calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portion 3 fixed to the cell body so as to contact the flow path, and a reflective member 5 for reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell body 40 by a window holding member 30 via a gasket 15, an annular sealing protrusion 15a is provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusion 42a is also provided on a support surface 42 of the cell body for supporting the second surface opposite to the first surface of the gasket.

Abstract: A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.

Abstract: A tool is equipped with a torque sensor, suited for a tightening task of a fastening component of a device such as a fluid control system that requires a large number of fastening components for assembly and has a narrow space for access to the fastening components, and capable of automatically detecting a tightening torque. The tool includes a torque sensor capable of detecting a tightening torque for tightening a fastening component acting on a bit. The torque sensor initiates measurement of the tightening torque when the tightening torque detected exceeds a set threshold value, completes measurement when the tightening torque detected falls below the set threshold value and a set time elapses, and outputs torque-related data formed on the basis of measurement data from measurement initiation to measurement completion and including a measurement time. The torque-related data includes a peak value of the measurement data.

Abstract: A fluid supply device and a fluid supply method capable of stably supplying a supercritical fluid includes a fluid supply device for supplying a fluid in a liquid state before being changed to a supercritical fluid toward a processing chamber. The fluid supply device comprises a condenser that condenses and liquefies a fluid in a gas state, a tank that stores the fluid condensed and liquefied by the condenser, a pump that pressure-feeds the liquefied fluid stored in the tank toward the processing chamber, and a heating means provided to a flow path communicating with a discharge side of the pump and for partially changing the liquid in the flow path to a supercritical fluid.

Abstract: A pipe joint includes first and second sleeves having fluid flow paths communicating with each other; an annular gasket interposed between abutting end surfaces of the sleeves; a male screw member having a through hole into which the first sleeve is inserted; and a female screw member having a through hole into which the second sleeve is inserted, the sleeves being joined by screwing the male screw member with the female screw member, wherein the pipe joint has a leak port opened at a portion of the outer peripheral surface of the male screw member not covered by the female screw member and communicates with a gap between the male screw member and the first sleeve to detect a leak fluid leaked from gaps between the sleeves and the gasket.

Abstract: A flow rate control device 100 includes a flow rate control valve 8 having a valve element 8a and a piezoelectric element 8b for moving the valve element, and a control circuit 9 for controlling an operation of the flow rate control valve 8, wherein, in order to perform a pulsed fluid supply, the control circuit 9 is configured so as to open-loop control an applied voltage to the piezoelectric element so that it approaches the target voltage after once applying a voltage V1 exceeding a target voltage V0 corresponding to a target displacement of the piezoelectric element, when a pulsed flow rate setting signal is given.

Abstract: A pressure control device 20 includes a pressure control valve 25, a flow resistance 23 provided downstream of the pressure control valve, for restricting a gas flow, a first pressure sensor 21 for measuring a gas pressure between the pressure control valve and the flow resistance, a second pressure sensor 22 for measuring a gas pressure downstream of the flow resistance, and an arithmetic control circuit 26 connected to the first pressure sensor and the second pressure sensor. The pressure control device is configured to control the gas pressure downstream of the flow resistance by adjusting an opening degree of the pressure control valve based on an output of the second pressure sensor regardless of an output of the first pressure sensor control, and calculate the flow rate of the gas downstream of the flow resistance based on the output of the first pressure sensor and the output of the second pressure sensor.

Abstract: A diaphragm valve including: a valve body having a flow path formed therein and a valve chamber recessed from an upper surface of the valve body; a diaphragm that is disposed in the valve chamber and elastically deformable to open and close the flow path and adjust an opening degree of the flow path; a stem for pressing the diaphragm to elastically deform the diaphragm; an actuator for driving the stem; a support mechanism that is fixed to the valve body and supports the stem and the actuator; wherein the stem includes a first stem member connected to the actuator via a displacement transmitting member, and a second stem member held by the support mechanism so as to be movable in the axial direction via a sleeve, the second stem member has an upper end portion which abuts against a lower end portion of the first stem member.

Abstract: A vaporization supply device includes a vaporizer for heating and vaporizing a liquid raw material L, a flow rate controller for controlling a flow rate of the gas supplied from the vaporizer to a gas supply destination, and a controller for heating the inside of the vaporizer to obtain a necessary gas flow rate, and performing a feedback control so that a pressure becomes equal to or higher than a predetermined value. The controller is configured so as to stop the feedback control at the time point when the flow rate control by the flow rate controller starts, then heat the liquid raw material by an amount of heat provided to the vaporizer more than the heat that has already been provided immediately before the feedback control ends, and change to the feedback control after a predetermined time has elapsed from the time point when the flow rate control by the flow rate controller starts.

Abstract: A mass flow sensor is provided with reduced zero point fluctuation, and a mass flow meter and a mass flow controller using the mass flow sensor, the mass flow sensor comprising a U-shaped flow path passage in which a fluid flows from first end to a second end, having a bottom portion and two straight portions connecting the bottom portion to the ends, a first thermal resistor wound around one of the straight portions, a second thermal resistor wound around the same straight portion as the first thermal resistor and provided away from the first thermal resistor toward the second end, and a heat dissipating portion provided so as to be in contact with the flow path passage on the side opposite to the second thermal resistor across the first thermal resistor.

Abstract: A fluid control device, capable of acquiring data related to an internal operation of a device, is provided. The Fluid control device V includes a bonnet part installing sensors for detecting the internal operation of the fluid control device and a valve body containing the bonnet part inside, and the valve body has a recess for containing the bonnet part and a slit, leading a communication cable connected to the sensors to the outside, opening one end on an opposite side of a base where a flow path is formed, and penetrating from an outside to the recess.

Abstract: A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. The fluid control device includes a valve body in which the flow path is formed, a diaphragm isolating a closed space from the flow path, a bonnet forming the closed space between the diaphragm and providing a penetration hole connected to the closed space and penetrated to be able to vertically move a diaphragm retainer, the diaphragm retainer vertically moving in the penetration hole to press the diaphragm and providing an increased diameter portion not to be removed from the penetration hole, a pressure sensor detecting a pressure inside of the closed space, and an elastic body interposing between the increased diameter portion of the diaphragm retainer and the bonnet inside of the closed space and elastically expanding and deflating between the increased diameter portion of the diaphragm retainer and the bonnet as the diaphragm retainer vertically moves.

Abstract: A vaporization supply apparatus 1 includes a preheating section 2 for preheating a liquid raw material L, a vaporization section 3 provided on top of the preheating section 2 for heating and vaporizing the preheated liquid raw material L sent from the preheating section 2, a flow rate control device 4 provided on top of the vaporization section 3 for controlling the flow rate of a gas G sent from the vaporization section 3, and heaters 5 for heating the preheating section 2, the vaporization section 3 and the flow rate control device 4.

Abstract: Provided is an actuator including a ball-type thrust amplifier therein that controls a valve in which a high-pressure fluid flows, and having less wear between members and a long lifespan. This actuator for a valve includes a thrust amplification mechanism therein, in which the thrust amplification mechanism includes a disk, a ball presser, a stem, and a plurality of balls that are sandwiched by and in contact with an upper surface of the disk, a tapered surface of the ball presser, and a tapered surface of the stem and disposed to move outward as the stem moves downward, the surfaces of the parts constituting the thrust amplification mechanism are coated with grease containing an additive, and the additive of the grease includes at least chloroalkane.