Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.

Abstract: [Problem] The main purpose of the present invention is to provide a casing for a fluid controller capable of enabling maintenance inside the casing even in a state where the lower part of the casing is fixed to a main body of a fluid controller, and improving maintainability. [Solution] A casing 1 for covering devices 104,106,108 on a main body 101 of a fluid controller 100, the casing 1 is configured so as to be dividable into a plurality of parts, and the plurality of parts comprising a first part 2 provided with a fixing portion 2i for fixing to the main body 101, a second part 4 attached to the first part 2, and a third part 5 attachably and detachably provided at an upper partition higher than a predetermined height position of the casing 1.

Abstract: A pressure sensor that can prevent application of excessive stress on a port and detect fluid differential pressure accurately. A base includes a sensor that detects a pressure difference between a first fluid and a second fluid. A first port is attached to the base and has a first flow path through which the first fluid is introduced. A second port is attached to the base and has a second flow path through which the second fluid is introduced. The outer diameter of the first port is equal to the outer diameter of the second port, and the diameter of the first flow path is smaller than the diameter of the second flow path.

Abstract: A flow rate control device includes a piezo valve having a metal diaphragm valve element that is opened and closed by a piezo actuator, a strain sensor for detecting a displacement amount of the piezo actuator, and a control circuit for receiving a detection signal of the strain sensor and controlling a drive voltage of the piezo actuator, wherein the control circuit is configured so as, by applying a positive drive voltage one or more times and then applying a negative drive voltage a plurality of times to the piezo actuator at a desired timing, to bring an amount of strain detected by the strain sensor close to zero when no drive voltage is applied to the piezo actuator.

Abstract: To provide a valve that is easily assembled and has a low possibility of breakage of a coupled section even when the valve has to be downsized or subjected to a large load. A valve has a valve unit and a drive unit, is configured to include: a first recess that is a recess formed in either one of a second stem or a first stem and is formed with a groove at a predetermined position on an inner circumferential surface of the recess; a second recess formed in another one thereof; a stem pin accommodated in both of the recesses; an urging member that is accommodated in the first recess and urges the stem pin to the other side; a sidewall through-hole that penetrates a sidewall of the second recess horizontally; and a ball that enters the sidewall through-hole.

Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.

Abstract: An object of the invention is to provide a valve device and the like including an inner disk that can be easily assembled, in which a Cv value is guaranteed and the inner disk is provided under a lower risk of being damaged. The valve device includes a valve body including first flow path, and a valve chamber; an inner disk including an inner side annular portion that is disposed in a periphery of a first opening, an outer side annular portion, and a connection portion; a diaphragm coming into contact with and separated from an annular upper side seat provided at an upper end portion of the inner side annular portion to cause interruption and communication between the flow paths; and an annular lower side seat that is provided at a lower end portion of the inner side annular portion.

Abstract: A fluid control apparatus includes: a base plate; and a gas line installed on the base plate. The gas line includes a resin member provided in a predetermined direction on the base plate, a first bracket provided on the resin member, a plurality of joints provided on the first bracket, a plurality of fluid control devices provided to the plurality of joints, and a heater mounted to the plurality of joints and the plurality of fluid control devices. The first bracket includes a first fixing portion fixed to the resin member, a first leg portion extending from the first fixing portion in a direction of away from the base plate, and a first installation portion protruding from an end portion of the first leg portion on an opposite side to the first fixing portion to intersect with the first leg portion and on which the joints are installed.

Abstract: Provided is a fluid control device that is compact and that enables data regarding an internal operation of the device to be acquired. A fluid control device V is disposed in a flow path of a fluid and enables data regarding an internal operation to be acquired, the fluid control device including a sensor hood 44 to which one or more sensors M2 for detecting an operation in the fluid control device are attached; a valve body 1 connected to the sensor hood; a diaphragm 42 held below the sensor hood, inside the valve body; a cover portion 5 that covers the outer periphery of the sensor hood; and a circuit board 60 that is electrically connected to the sensor(s) and for which a thickness direction of the circuit board and a flow path direction are arranged in the same direction on the inside of the cover portion.

Abstract: The present invention has a purpose of providing a joint with a built-in filter capable of replacing the filter without requiring removal of the joint from piping, thereby facilitating the replacement of the filter. The joint with the built-in filter includes: first and second inlet/outlet sections; a communication space formed to communicate with the first and second inlet/outlet sections; and a maintenance opening sealed in an airtight manner during non-maintenance. A filter element has: a cylindrical filter body; a base end section attached to an opening at one end of the filter body in an airtight manner and including a seal ring disposed between an outer circumferential surface thereof and an inner surface of the communication space; and a tip section disposed to seal an opening at the other end of the filter body in the airtight manner.

Abstract: A flow rate control device having a high response accuracy is provided. A flow rate control device includes a flow sensor measuring a flow rate of a fluid, and a controller adjusting the flow rate where the flow rate of the fluid to be a flow rate set value. The controller includes a control valve changing the flow rate, a drive circuit driving the control valve, a sensor response adjustment circuit adjusting a frequency response of a measured value of the flow sensor, and a first filter attenuating a predetermined frequency band of an output of the sensor response adjustment circuit. The drive circuit, the flow sensor, the sensor response adjustment circuit, and the first filter, configure a feedback loop. A deviation between the flow rate set value and an output of the first filter becomes an input to the drive circuit.

Abstract: A diaphragm includes: a metal thin plate; and a thin film layer formed over an entirety of a surface on one side of the thin plate.

Abstract: A fluid supply system includes: a support body having: a base plate; a side plate provided on one side of the base plate in the longitudinal direction so as to be orthogonal to the base plate; and a top plate provided on one end of the base plate in the height direction so as to be orthogonal to the base plate and the side plate; a process-gas supply unit provided on an outer surface of the top plate; a liquid supply unit provided on an inner surface of the side plate so as to communicate with the process-gas supply unit via a communication-flow-channel forming block; and a purge-gas supply unit provided on an inner surface of base plate so as to communicate with the process-gas supply unit via a communication pipe.

Abstract: To enable accurate and simple diagnosis of an operation abnormality of a valve. A valve V1 capable of detecting an operation abnormality has a magnet M1 that is attached in the vicinity of a pressing adapter 52 of a stem 53 that slides according to an opening/closing operation of the valve V1, and a magnetic sensor M2 that is attached to a surface acing the stem 53, inside the pressing adapter 52 that presses a peripheral edge of a diaphragm 51, and detects a change in a distance between the magnet M1 and the magnetic sensor M2. Further, an abnormality determination mechanism compares the change in the distance between the magnet M1 and the magnetic sensor M2 at the time of abnormality diagnosis detected by the magnetic sensor M2 and a previously measured change in the distance between the magnet M and the magnetic sensor M2 at the time of normality, and determines whether or not there is an abnormality.

Abstract: The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, a first light-transmission member 11 for transmitting light from the light source to the measurement cell, a second light transmission member 12 for transmitting light from the measurement cell to the photodetector, a lens 3A provided in the fluid unit, the lens 3A being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensor 5 for measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuit 28 for detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure se

Abstract: A valve which can accurately detect an operation of the valve is provided. The valve includes a valve body defining a fluid flow passage, a valve disk operating to be able to open and close the fluid flow passage, an actuator driving the valve disk by supplying or interrupting a working fluid, a stem transmitting a driving force of the actuator to the valve disk, a detection means detecting an opening and closing operation of the valve disk, and an elastic member fixing a ring-shaped magnetic body inserted through an end of the stem to the stem. The detection means includes the magnetic body fixed by the elastic member, and a magnetic sensor detecting a change in a magnetic field of the magnetic body.

Abstract: A concentration measurement method performed in a concentration measurement device including an electric unit having a light source and a photodetector, a fluid unit having a measurement cell through which a gas flows, and a processing circuit for calculating a concentration of the gas based on an intensity of a light passing through the measurement cell. The concentration measurement method includes a step of determining an absorption coefficient of the measurement gas using a reference absorption coefficient determined in association with the reference gas and a correction factor associated with the measurement gas, and a step of obtaining a concentration of the measurement gas flowing in the measurement cell using the absorption coefficient of the measurement gas.

Abstract: Provided is a concentration measurement device that can be miniaturized without using an optical fiber. The concentration measurement device including a measurement cell having a gas flow path and an optical path intersecting the gas flow path; a light source for emitting light inside the optical path, the light source 14 being installed at one end of the optical path; a first photodetector for detecting a light emitted from the light source as a reference light, the first photodetector being installed at a side of the light source and rearward from a distal end of the light source in a light emitting direction along an optical axis of the light source; a second photodetector for detecting a light emitted from the light source for measuring light absorption, the second photodetector being installed at another end of the optical path.

Abstract: To provide a pipe in which the pipe having been fixed is prevented from being loosened by co-rotation. A pipe includes at least a first pipe and a second pipe and connects blocks each having an internal flow path and an open end of the flow path on a surface thereof. The other end portion of the first pipe is provided with an outward flange, and an annular gasket is interposed between butt end faces of the first and second pipes, and a male thread member that is inserted onto the first pipe, has male threads on a peripheral surface thereof, and abuts against the outward flange. The other end portion of the second pipe is provided with a cap nut member that is inserted onto the second pipe, has an outward flange, has female threads, and has an inward flange to be engaged with the outward flange.

Abstract: To provide a safety valve capable of suppressing creep of a fusible alloy to the minimum even if a member that blocks a flow path directly presses the fusible alloy. A fusible alloy is disposed between a blocking member that blocks the flow of fluid flowing from a discharge path of a fluid apparatus and a pressing cap, a reservoir part 8 that reserves the fused fusible alloy is formed at least in one of the blocking member 3 and the pressing cap, and two porous plates punched positions of which do not overlap with each other are arranged between the reservoir part and the fusible alloy.