Abstract: Provided is a fluid control device that is compact and that enables data regarding an internal operation of the device to be acquired. A fluid control device V is disposed in a flow path of a fluid and enables data regarding an internal operation to be acquired, the fluid control device including a sensor hood 44 to which one or more sensors M2 for detecting an operation in the fluid control device are attached; a valve body 1 connected to the sensor hood; a diaphragm 42 held below the sensor hood, inside the valve body; a cover portion 5 that covers the outer periphery of the sensor hood; and a circuit board 60 that is electrically connected to the sensor(s) and for which a thickness direction of the circuit board and a flow path direction are arranged in the same direction on the inside of the cover portion.

Abstract: The present invention has a purpose of providing a joint with a built-in filter capable of replacing the filter without requiring removal of the joint from piping, thereby facilitating the replacement of the filter. The joint with the built-in filter includes: first and second inlet/outlet sections; a communication space formed to communicate with the first and second inlet/outlet sections; and a maintenance opening sealed in an airtight manner during non-maintenance. A filter element has: a cylindrical filter body; a base end section attached to an opening at one end of the filter body in an airtight manner and including a seal ring disposed between an outer circumferential surface thereof and an inner surface of the communication space; and a tip section disposed to seal an opening at the other end of the filter body in the airtight manner.

Abstract: A fluid supply system includes: a support body having: a base plate; a side plate provided on one side of the base plate in the longitudinal direction so as to be orthogonal to the base plate; and a top plate provided on one end of the base plate in the height direction so as to be orthogonal to the base plate and the side plate; a process-gas supply unit provided on an outer surface of the top plate; a liquid supply unit provided on an inner surface of the side plate so as to communicate with the process-gas supply unit via a communication-flow-channel forming block; and a purge-gas supply unit provided on an inner surface of base plate so as to communicate with the process-gas supply unit via a communication pipe.

Abstract: A flow rate control device having a high response accuracy is provided. A flow rate control device includes a flow sensor measuring a flow rate of a fluid, and a controller adjusting the flow rate where the flow rate of the fluid to be a flow rate set value. The controller includes a control valve changing the flow rate, a drive circuit driving the control valve, a sensor response adjustment circuit adjusting a frequency response of a measured value of the flow sensor, and a first filter attenuating a predetermined frequency band of an output of the sensor response adjustment circuit. The drive circuit, the flow sensor, the sensor response adjustment circuit, and the first filter, configure a feedback loop. A deviation between the flow rate set value and an output of the first filter becomes an input to the drive circuit.

Abstract: To enable accurate and simple diagnosis of an operation abnormality of a valve. A valve V1 capable of detecting an operation abnormality has a magnet M1 that is attached in the vicinity of a pressing adapter 52 of a stem 53 that slides according to an opening/closing operation of the valve V1, and a magnetic sensor M2 that is attached to a surface acing the stem 53, inside the pressing adapter 52 that presses a peripheral edge of a diaphragm 51, and detects a change in a distance between the magnet M1 and the magnetic sensor M2. Further, an abnormality determination mechanism compares the change in the distance between the magnet M1 and the magnetic sensor M2 at the time of abnormality diagnosis detected by the magnetic sensor M2 and a previously measured change in the distance between the magnet M and the magnetic sensor M2 at the time of normality, and determines whether or not there is an abnormality.

Abstract: A diaphragm includes: a metal thin plate; and a thin film layer formed over an entirety of a surface on one side of the thin plate.

Abstract: The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, a first light-transmission member 11 for transmitting light from the light source to the measurement cell, a second light transmission member 12 for transmitting light from the measurement cell to the photodetector, a lens 3A provided in the fluid unit, the lens 3A being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensor 5 for measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuit 28 for detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure se

Abstract: A valve which can accurately detect an operation of the valve is provided. The valve includes a valve body defining a fluid flow passage, a valve disk operating to be able to open and close the fluid flow passage, an actuator driving the valve disk by supplying or interrupting a working fluid, a stem transmitting a driving force of the actuator to the valve disk, a detection means detecting an opening and closing operation of the valve disk, and an elastic member fixing a ring-shaped magnetic body inserted through an end of the stem to the stem. The detection means includes the magnetic body fixed by the elastic member, and a magnetic sensor detecting a change in a magnetic field of the magnetic body.

Abstract: A concentration measurement method performed in a concentration measurement device including an electric unit having a light source and a photodetector, a fluid unit having a measurement cell through which a gas flows, and a processing circuit for calculating a concentration of the gas based on an intensity of a light passing through the measurement cell. The concentration measurement method includes a step of determining an absorption coefficient of the measurement gas using a reference absorption coefficient determined in association with the reference gas and a correction factor associated with the measurement gas, and a step of obtaining a concentration of the measurement gas flowing in the measurement cell using the absorption coefficient of the measurement gas.

Abstract: To provide a pipe in which the pipe having been fixed is prevented from being loosened by co-rotation. A pipe includes at least a first pipe and a second pipe and connects blocks each having an internal flow path and an open end of the flow path on a surface thereof. The other end portion of the first pipe is provided with an outward flange, and an annular gasket is interposed between butt end faces of the first and second pipes, and a male thread member that is inserted onto the first pipe, has male threads on a peripheral surface thereof, and abuts against the outward flange. The other end portion of the second pipe is provided with a cap nut member that is inserted onto the second pipe, has an outward flange, has female threads, and has an inward flange to be engaged with the outward flange.

Abstract: Provided is a concentration measurement device that can be miniaturized without using an optical fiber. The concentration measurement device including a measurement cell having a gas flow path and an optical path intersecting the gas flow path; a light source for emitting light inside the optical path, the light source 14 being installed at one end of the optical path; a first photodetector for detecting a light emitted from the light source as a reference light, the first photodetector being installed at a side of the light source and rearward from a distal end of the light source in a light emitting direction along an optical axis of the light source; a second photodetector for detecting a light emitted from the light source for measuring light absorption, the second photodetector being installed at another end of the optical path.

Abstract: To provide a safety valve capable of suppressing creep of a fusible alloy to the minimum even if a member that blocks a flow path directly presses the fusible alloy. A fusible alloy is disposed between a blocking member that blocks the flow of fluid flowing from a discharge path of a fluid apparatus and a pressing cap, a reservoir part 8 that reserves the fused fusible alloy is formed at least in one of the blocking member 3 and the pressing cap, and two porous plates punched positions of which do not overlap with each other are arranged between the reservoir part and the fusible alloy.

Abstract: A valve device includes: a flow path block in which a fluid inflow path and a fluid outflow path are formed; a diaphragm configured to open and close between the fluid inflow path and the fluid outflow path; and an actuator including a case, a piston accommodated in the case and having an air flow path formed therein, a stem configured to move the diaphragm to an open position or a closed position by moving integrally with the piston in an axial direction, an air introduction chamber surrounded by the case and the piston, and a one-touch joint configured to supply an air fluid to the air introduction chamber via the air flow path. The one-touch joint is coupled to the piston.

Abstract: A gas supply device capable of saving space and supplying a mixed gas having components with stable concentration to a processing chamber in a short time includes: a plurality of fluid control units each including a flow path through which gas flows, and fluid control devices provided in the middle of the flow path; a merging flow path including a plurality of connecting portions fluidly connected to the plurality of fluid control units and a single gas outlet portion which derives the gas introduced through the plurality of connecting portions; wherein a plurality of connecting portions is arranged symmetrically with respect to the gas outlet portion in the flow path direction of the merging flow path, and two or more fluid control units are fluidly connected to each of the plurality of connecting portions.

Abstract: A diaphragm valve, which is miniaturized while ensuring a required flow rate and has improved assemble workability and maintainability, includes a body defining a flow path; a diaphragm provided on a bottom surface of an accommodation recess; a fixing ring screwed with a screw portion formed on an inner peripheral surface of the accommodation recess to fix the diaphragm to the body; a stacked piezoelectric actuator; a support plate supporting the stacked piezoelectric actuator; a cylindrical actuator cover holding a diaphragm presser and configured to transmit the piezoelectric displacement of the stacked piezoelectric actuator while accommodating the stacked piezoelectric actuator inside; and a fixing member screwed with the common screw portion and cooperating with the fixing ring to fix the position of the support plate in the accommodation recess.

Abstract: The invention provides a valve capable of suppressing unintended valve opening/closing by providing a play state during a manual operation and also enabling smooth transition from the play state to a rotation state. In the valve, a tip of another end portion of the stem and the engagement hole of an operation handle form a corresponding circumferential surface and a planar section continuous to the circumferential surface. Either one of the tip of the other end portion of the stem and the planar section of the engagement hole of the operation handle is formed to have two flat surfaces defining a predetermined angle, and thereby generates predetermined play when the operation handle is rotated in one direction after being rotated in another direction.

Abstract: An object is to provide a joint in which a tapered portion of a body to which surface treatment has been applied is not seized when a pipe is attached. The joint includes a body having a tapered portion on an inner peripheral surface of at least one end portion, a threaded portion on an outer peripheral surface of the at least one end portion, and a flow path therein; a ring having a tapered outer peripheral surface in sliding contact with the tapered portion of the body; and a nut pushing the tapered outer peripheral surface of the ring against the tapered surface of the body by being screwed with a parallel threaded portion of the threaded portion of the body to which a pipe is connected and, in which surface treatment for preventing adsorption of liquid is applied to a surface of the body.

Abstract: A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.

Abstract: [Problem] An electrostatic capacitive pressure sensor capable of detecting a pressure of a fluid with high accuracy, capable of miniaturization, and having a wider pressure detection range, and a pressure detection method using the same. [Solution] The electrostatic capacitive pressure sensor comprises: a reference chamber provided between a fixed electrode and a movable electrode that deflects in accordance with fluid pressure; a measurement chamber filled with a fluid for causing deflection of the movable electrode; a means for sequentially applying a first potential and a second potential to the fixed electrode and generating a first output signal corresponding to the first potential and a second output signal corresponding to the second potential; and a means for generating a difference signal between the first output signal and the second output signal.

Abstract: The driving device includes a piezoelectric element, a power supply unit, a first resistor, a second resistor, a measuring unit and a control unit, wherein resistance values of the first resistor and the second resistor are smaller than an insulating resistance value of the piezoelectric element, the measuring unit measures, a voltage across the first resistor (voltage between a first terminal and a second terminal), in a state of supplying a predetermined voltage from the power supply unit, and the control unit calculates a resistance value of the piezoelectric element from a voltage value obtained by the measurement of the measuring unit, and determines, whether or not degradation has occurred in the piezoelectric element based on the calculated resistance value.