Abstract: A semiconductor device producing apparatus includes a first transporter which moves a substrate to a first unit to undergo at least a first process, and a second transporter, other than the first transporter, which moves the substrate to a second unit, to undergo at least a second process.

Abstract: A character recognition method includes steps of comparing input image data with character patterns of a predetermined dictionary and recognizing a character indicated by the input image data without requiring any special hardware in a conventional character recognition apparatus. Namely, the input image data is processed by using an unwanted-dot elimination mask and processed by using a positive mask and negative mask of each of the character patterns in the dictionary, and then a discrepancy ratio of each of the character patterns is calculated. Consequently, highly accurate character recognition can be carried out at a low cost without using special hardware, by decreasing the negative infludence of a flaw, a missing portion, dust, and the like.