Patents Assigned to Fujitsu Tohoku Electronics Ltd.
  • Apparatus for producing semiconductor device
    Patent number: 5932014
    Abstract: A semiconductor device producing apparatus includes a first transporter which moves a substrate to a first unit to undergo at least a first process, and a second transporter, other than the first transporter, which moves the substrate to a second unit, to undergo at least a second process.
    Type: Grant
    Filed: November 13, 1996
    Date of Patent: August 3, 1999
    Assignees: Fujitsu Limited, Fujitsu Tohoku Electronics Ltd.
    Inventors: Tetsuya Hayashi, Kazunori Okuyama, Tsuyoshi Inomata, Koji Nozaki, Minoru Hirose