Abstract: An ion beam milling system for the preparation of transmission electron microscope specimens suitable for atomic resolution imaging, particularly of III-V and II-VI compound semiconductors and their alloys, is described. The system includes ion beam sources and reactive molecular gas jets which may be operated in combination or separately, as appropriate. A new heated specimen holder, giving greatly increased reaction rates with the molecular gas jet, allows milling angles very close to zero.
Abstract: An improved specimen cooling holder for transmission electron microscopy is described. Low thermal conductivity pins near the specimen and an improved conductor/dewar connection reduce specimen vibration, providing improved image resolution. Multiple heaters facilitate accurate temperature control and bakeout procedures.
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