Abstract: Method and subsystem are provided for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site utilizing an estimated change in temperature of motors caused when the motors drive the stage according to a number of possible trajectories. The method includes receiving reference data which represent locations of microstructures to be processed at the site, determining a plurality of possible trajectories based on the data, and estimating a change of temperature of motors caused when the motors drive the stage based on each of the possible trajectories. The method also includes determining a substantially optimum trajectory from the possible trajectories wherein positioning accuracy of the stage is maximized by following the substantially optimum trajectory.

Abstract: The invention provides a system and method for vaporizing a target structure on a substrate. According to the invention, a calculation is performed, as a function of wavelength, of an incident beam energy necessary to deposit unit energy in the target structure. Then, for the incident beam energy, the energy expected to be deposited in the substrate as a function of wavelength is calculated. A wavelength is identified that corresponds to a relatively low value of the energy expected to be deposited in the substrate, the low value being substantially less than a value of the energy expected to be deposited in the substrate at a higher wavelength. A laser system is provided configured to produce a laser output at the wavelength corresponding to the relatively low value of the energy expected to be deposited in the substrate.

Abstract: A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis.

Abstract: A non-symmetrical scanning mirror for a laser scanning system is stiffer at a bottom end than at a top end. The mirror, which is driven from the bottom end, has a relatively high resonant frequency and can thus accelerate quickly and smoothly. The mirror may be wider or thicker at the bottom end or it may be made stiffer by attaching stiffeners to the bottom end.

Abstract: A system for scanning biochip arrays includes a unique image array identifier recorded for each array, and a computer-stored record corresponding to each identifier and containing the parameters of the experiment in the array identified by the identifier. The system further includes means for accessing a protocol library to retrieve the scanning protocols associated with the identified arrays and then scanning the arrays in accordance with the respective protocols. The resulting image maps generated by the scanners are stored in locations corresponding to the associated identifiers.

Abstract: A laser polarization control apparatus includes a polarization modifying device, such as a liquid crystal variable retarder, and a controller. The polarization modifying device receives a laser beam and modifies the polarization of the laser beam. The controller, which is connected to the polarization modifying device, adjusts an input to the polarization modifying device in order to control modification of the polarization of the laser beam based on alignment of a structure to be processed by the laser beam. For example, the polarization of the laser beam may be rotated to correspond with the alignment of a link in a semiconductor device to be cut by the laser beam. The polarization modifying device is configured for incorporation into a laser processing system that produces the laser beam received by the polarization modifying device and that focuses the laser beam modified by the polarization modifying device onto a workpiece that includes the structure to be processed by the laser beam.

Abstract: A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis.

Abstract: A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis.

Abstract: A high-speed precision positioning apparatus has a stage supported by a platen. The stage is driven by a plurality of drive motors that are co-planar with the stage and arranged symmetrically around the stage. The drive motors apply drive forces directly to the stage without any mechanical contact to the stage. The drive forces impart planar motion to the stage in at least three degrees of freedom of motion. In the remaining three degrees of freedom the motion is constrained by a plurality of fluid bearings that operate between the stage and the platen. The drive motors are configured as magnets, attached to the stage, moving in a gap formed in-between top and bottom stationary coils. Integral force cancellation is implemented by a force cancellation system that applies cancellation forces to the stage. The cancellation forces, which are co-planar with a center of gravity of the stage and any components that move with the stage, cancel forces generated by planar motion of the stage.

Abstract: An optical scanning system uses a low-resolution scanning operation, to automatically adjust the sensitivity of the system. The system performs a low-resolution scanning operation by scanning a line, automatically and iteratively setting the levels of excitation signal power and detector gain, skipping a plurality of lines and scanning a next line, adjusting the levels as appropriate, skipping a plurality of lines and scanning a next line, and so forth. After the system sensitivities have been set, the calibrated system then scans all the lines of the sample to collect data. The calibrated system thus scans for the first time the lines that were skipped during the low resolution scanning operation.

Abstract: An optical scanning system includes a power meter that during calibration operations is illuminated by an attenuated excitation beam. The power meter measures optical power in the attenuated excitation beam at various index settings of a variable optical attenuator, and the system constructs a lookup table that relates incident excitation beam power to the index settings of the attenuator. The system then uses the table to select the appropriate setting for the attenuator in order to deliver to the sample an excitation beam of a specified optical power. The system calibrates the gain of a detector by redirecting, or reflecting, the excitation beam of known intensity to the detector. A photometric device in the detector produces a signal that is proportional to the intensity of the beam at various gain settings. The system then produces a lookup table that relates the gain settings to the actual gain of the detector, that is, to the ratio of the known incident power to the detector readings.

Abstract: An system for orienting optical components comprises a spherical mirror support that rests in an indentation and a separate fixture for aligning the support. The alignment fixture engages the support for alignment and then is removed once the desired orientation has been secured by a simple clamp.

Abstract: A method and system are provided for suppressing or filtering multiple reflections which corrupt photometric (grey scale or color) or height measurements within optical systems such as imaging systems. The reflections may originate within the instrument (i.e. back reflections) or may be inter-reflections between one or more surfaces in a scene. In one embodiment, a beam of electromagnetic energy generated by a source is polarized in a first rotational sense, is transmitted to a point of interest (i.e., scene) of an object, is reflected and received by a receiver having a polarizer which passes reflected electromagnetic energy having a second rotational sense opposite the first rotational sense. In this way, unwanted reflections from the point of interest having the first rotational sense are suppressed and back-reflections to the source of electromagnetic energy are substantially eliminated.

Abstract: A system that projects a multi-color laser beam image based on assembly or alignment data of a manufacturing process onto a work surface. The system provides, for example, an optical layup template in manufacturing processes, especially the layup of composite laminates. In various implementations additional important features are shown. A plurality of lasers emit beams of different colors, including colors different from that emitted by any one laser. In certain implementations, the system comprises a red and a green laser adapted to emit red, green and yellow laser beams. Software to control the system is also disclosed.

Abstract: A controlled, switched laser system for vaporizing a target structure on a substrate includes a diode-pumped, solid-state laser for producing a laser output, a controllable switch for controlling the on/off state and power level of the laser, and a wavelength shifter. The wavelength shifter shifts the wavelength of the laser output from a conventional wavelength to a wavelength beyond the absorption edge of the substrate but shorter than 1.2 .mu.m in order to obtain a decrease in absorption of the laser output by the substrate due to the shift in the wavelength of the laser output. The wavelength shifter is removably insertable into the switched laser system so as to enable the switched laser system to operate at the conventional wavelength and at the wavelength beyond the absorption edge of the substrate. Heating of the substrate and hence damage to the substrate is limited due to the wavelength being beyond the absorption edge of the substrate.

Abstract: A laser beam distribution apparatus for preferably directing laser energy upon work pieces. The apparatus includes a laser beam, and a series of beam reflector members disposed along a beam path, at least one of which is movable and has at least one selectable transmissive portion and at least one selectable reflective portion. In addition, the apparatus includes a selectively controllable drive device constructed to position a selected portion of the movable reflector member in the laser beam path to distribute the beam to a selectable destination.

Abstract: A bi-directional optical scanning system includes a spring-stiffened, taut-band mechanical subsystem that translates rotational motion of a servo-controlled actuator to translational (scan line or "fast axis") motion of a sample relative to a stationary objective lens. A first taut steel band attaches to a first end of a shuttle that moves the sample over the fast axis. The band then wraps partially in one direction around a light-weight wheel that is rotated by the servo-controlled actuator. The second end of the band attaches to a pre-loaded spring that is, in turn, attached to the wheel. A second taut steel band wraps partially around the wheel in the opposite direction, with one end of the band attached to the wheel and the other end attached to a second end of the shuttle. When the wheel rotates in one direction, the first band pulls the shuttle, and thus, the sample, in the forward scan direction.

Abstract: An imaging method and system for optimum sampling, image restoration and enhancement is disclosed where imaging errors associated with scanning a fiber optic image guide are identified and filtered to restore image quality to the available resolution limit. Scanned image samples are synchronized with spot positions corresponding to the center of each fiber to avoid generating spurious data resulting from unwanted modulation of the scanning beam by the fiber optic array, manifested as large amplitude multiplicative noise. A detector, such as a position sensitive device, is utilized which allows for monitoring both spot intensity and position. Peak detection on the intensity waveform determines the instant at which the beam is to be sampled. The method applies to any imaging system where a beam of electromagnetic energy such as radiant energy is scanned through a plurality of optical fibers to irradiate the object under examination.

Abstract: A method and system for three-dimensional imaging of objects, including integrated circuit interconnections and many other microelectronic assemblies and miniature parts, is used to greatly improve the efficiency of triangulation-based laser line scanning systems. A scanning beam is incident at a normal angle to the X,Y inspection plane with the scan line oriented at 45.degree., diagonal to an axis defining a first direction of motion. Motion of the imaging head along the axis is used to acquire line scan images in the non-orthogonal coordinate system having symmetry about the orthogonal axes of motion.

Abstract: A method and system for high-speed, high-resolution, 3-D imaging of an object including an anamorphic magnification and field lens system to deliver the light reflected from the object to a small area position detector having a position-sensing direction. Preferably, an acousto-optic deflector together with associated lens elements scans a beam of modulated laser light across the object to produce a telecentric, flat field scan. The deflector has a feedback loop to enable uniform illumination of the object. The light scattered from the object is collected by a telecentric receiver lens. A combined spatial and polarization filtering plane preferably in the form of a programmable mask is provided to control the polarization and acceptance angles of the collected light. A reduction or focusing lens is positioned immediately behind the filtering plane and is utilized as a telescope objective.