Patents Assigned to General Vacuum, Inc.
  • Electron beam evaporation of transparent indium tin oxide
    Patent number: 6153271
    Abstract: A process for depositing a transparent coating of indium tin oxide on a substrate comprising providing said substrate in a partial vacuum environment and conducting electron beam evaporation of tin oxide doped indium oxide granules while operating an ion source providing oxygen adjacent said substrate until a coating of indium tin oxide is deposited on at least a portion of said substrate.
    Type: Grant
    Filed: December 30, 1999
    Date of Patent: November 28, 2000
    Assignee: General Vacuum, Inc.
    Inventor: Gerald T. Mearini