Abstract: An apparatus provides .theta.-rotational motion about a Z-axis. The apparatus is improved as follows. A stop structure is carried by the apparatus and rotates with it. The stop structure has a detent engagement structure. A detent structure comprises a rotatable member located adjacent to the stop structure. The rotatable member is mounted for free rotation about an axis parallel to the Z-axis. The rotatable member defines a plurality of detentes which are adapted for sequential engagement with the detent engaging structure as the stop structure rotates about the Z-axis. A biasing structure serves for biasing the stop member to deter it from rotating. The biasing structure is overcome by action of the detent engaging structure with any one of the detentes and otherwise prevents rotation of the stop member. A stationary detent is located adjacent the stop member. The stationary detent engages with and halts rotation of the stop member beyond a selected rotational position.

Abstract: An improvement is set forth in a robotic arm structure which includes at least two links. .theta. motion is provided about a primary axis at the proximal end portion of the proximalmost of the links. R motion proceeds radially from the primary axis whereby the distal end portion of the distalmost of the links can be moved in a radially extending straight line. An end effector is pivotally mounted for rotation relative to the distal end portion of the distalmost link about an end effector axis which is parallel to the primary axis. The structure is improved by adding one or more of a yaw motor, a roll motor and a pitch motor for rotating the wrist of the arm about the respective axes. A sensor array senses the R, .theta., Z and yaw, roll and/or pitch motions and creates and transmits electronic signals representative thereof to a computer controller which monitors and controls the R, .theta., Z and yaw, roll and/or pitch motions.

Abstract: A robotic arm mechanism provides motion to an end effector via a motor driving a drive pulley. The drive pulley is connected by a belt structure to drive a driven pulley. The motor is mounted to a bracket. The bracket is slidably mounted to a base plate. The bracket is positioned relative to the base plate to provide desired tension in the belt structure. The bracket is fastened to the base plate by a bolt structure which extend from the base plate orthogonally to the motor. A threaded bore extends fully through the bracket from a distal mouth thereof removed from the driven pulley. The bore has an axis which is located generally in a plane which is contiguous with or parallel to the axes of the respective drive and driven pulleys. The bore extends from an opening facing the distal side downwardly to the base plate and towards the axis of the driven pulley. A set screw is engaged with the bore and extends through it such that the screw's tip forcibly engages with the base plate.

Abstract: A vertical positioner comprises a rigid frame. A rigid vertically extending structure extends upwardly from a base to its upper end portion. A generally horizontal flange forms the structure upper end portion. It has a central opening and at least two peripheral openings. A vertically movable structure is telescopically mounted to the frame. It comprises an upper plate located above the flange. A lower generally parallel plate is located below the flange. A pair of parallel rods extend between the plates and pass through flange bearings. A central tube is connected between the lower and upper plates and passes through the flange via bearings. A motor is supported rigidly relative to the base for motivating relative vertical motion.

Abstract: An arm structure includes either two or three links pivotally connected to one another with a hand or end effector at the distal end of the distal link. Straight line movement of the pivoting mounting place of the end effector is provided from a rotating drive wheel coaxial with the pivoting of the proximal end of the proximal link. A drive wheel coaxially with the pivot of the proximal end of the proximal link causes the first and second links to pivot about their pivot axis. This pivoting causes the first link to pivot about its proximal end and causes the end effector to pivot in the two link version and causes the second and third links to pivot about their pivot axis in the three link version. A housing can be present intermediate the ends of the first link to provide a gearing adjustment. Generally, .theta. and Z motors also are present. The arm structure is useful for moving wafers, hard computer discs, and the like for processing, loading, unloading, etc.

Abstract: A robotic arm comprises a plurality of sequentially pivotally attached links. The proximal end portion of the proximalmost of the links is pivotally mounted to a relatively static structure. An end effector structure has two substantially oppositely extending hands each capable of picking up a workpiece. The end effector structure is centrally pivotally mounted to the distal end portion of the distalmost link. The links, end effector structure and static structure are such as to allow the robotic arm to reverse across the pivot axis of the proximal end portion of the proximalmost of the links. A radial drive serves for driving the links in a manner such that the pivot axis of the central portion of the end effector structure moves only substantially linearly radially along a straight line passing through and perpendicular to the pivot axis of the proximal end portion of the proximalmost of the links and to the pivot axis of the central portion of the end effector structure.