Abstract: The invention relates to a micromechanically produced nozzle for producing reproducibly small drops which consist of a liquid container delimited by a silicon structure and a pyrex structure. The silicon structure is a silicon wafer consisting of a silicon oxide layer (SiO2) and a silicon nitride layer (SI3N4). The wafer has a nozzle of silicon oxide (SiO3), which forms a nozzle opening of a liquid container. The liquid is fed into the liquid container through a channel formed in the pyrex structure. A disk made of a piezoelectric material exerts a pressure on the liquid in the container, which passes through the nozzle in the form of a drop.
Type:
Grant
Filed:
February 8, 2001
Date of Patent:
February 25, 2003
Assignee:
GenSpec S.A.
Inventors:
Philippe Luginbuhl, Pierre François Indermuhle, Damian Twerenbold