Patents Assigned to GES Associates LLC
  • Substrate processing apparatuses and systems
    Patent number: 10138551
    Abstract: A system for processing substrates is described. In one embodiment, the system comprises a process chamber, at least one electrical resistance heater, and at least one Coanda effect gas injector.
    Type: Grant
    Filed: July 28, 2011
    Date of Patent: November 27, 2018
    Assignee: GES Associates LLC
    Inventors: Dennis Goodwin, Sr., Jeff Mittendorf, Charles J. Moretti, John W. Rose, Earl Blake Samuels