Patents Assigned to Gigaphoton Inc.
  • Patent number: 11145429
    Abstract: An extreme ultraviolet chamber apparatus includes: a chamber; an EUV condensing mirror arranged in the chamber; a first nozzle arranged in an outer peripheral portion of the EUV condensing mirror and configured to feed a gas in a first direction along a reflective surface of the EUV condensing mirror; a second nozzle arranged in the outer peripheral portion of the EUV condensing mirror and configured to feed a gas in a second direction away from the EUV condensing mirror; and an exhaust port arranged in the chamber.
    Type: Grant
    Filed: March 17, 2020
    Date of Patent: October 12, 2021
    Assignee: Gigaphoton Inc.
    Inventors: Atsushi Ueda, Gota Niimi, Georg Soumagne
  • Publication number: 20210307150
    Abstract: An extreme ultraviolet light generation apparatus includes a chamber device, a concentrating mirror, an exhaust port, and a central gas supply port. The exhaust port is formed at the chamber device and is formed on the side lateral to a focal line and opposite to the reflection surface with respect to the plasma generation region. The central gas supply port is formed on the side opposite to the exhaust port with respect to the plasma generation region on the supply line passing through the exhaust port, the plasma generation region, and an inner side of a peripheral portion of the reflection surface. The central gas supply port supplies the gas toward the exhaust port along the supply line through the plasma generation region.
    Type: Application
    Filed: January 28, 2021
    Publication date: September 30, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Koichiro KOGE, Atsushi UEDA, Takayuki OSANAI
  • Publication number: 20210291297
    Abstract: A laser processing apparatus includes a placement base on which a workpiece is placed, a beam shaping optical system configured to shape laser light in such a way that a laser light irradiated region of a mask configured to block part of the laser light has a rectangular shape having short edges and long edges, a second radiation width of the irradiated region in the direction parallel to the long edges being changeable independently of a first radiation width of the irradiated region in the direction parallel to the short edges, and the irradiated region being movable in the direction parallel to the long edges, a projection optical system configured to project a pattern of the mask on the workpiece placed on the placement base, and a mover configured to be capable of moving the irradiated region in the direction parallel to the short edges.
    Type: Application
    Filed: June 8, 2021
    Publication date: September 23, 2021
    Applicant: Gigaphoton Inc.
    Inventor: Masashi SHIMBORI
  • Publication number: 20210294223
    Abstract: A wavelength control method of a laser apparatus includes sequentially obtaining target wavelength data of a pulse laser beam, sequentially saving the target wavelength data, sequentially measuring a wavelength of the pulse laser beam to obtain a measured wavelength, calculating a wavelength deviation using the measured wavelength and the target wavelength data at a time before a time when the measured wavelength is obtained, and feedback-controlling the wavelength of the pulse laser beam using the wavelength deviation.
    Type: Application
    Filed: June 8, 2021
    Publication date: September 23, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Takuma YAMANAKA, Hirotaka MIYAMOTO
  • Publication number: 20210298160
    Abstract: An extreme ultraviolet light generation apparatus may include a chamber device, a concentrating mirror, a central gas supply port configured to supply gas along a focal line passing through a first focal point and a second focal point from the center side of the reflection surface, and a first peripheral gas supply port disposed at a peripheral portion of the reflection surface and configured to supply gas in a direction from the outer side of the reflection surface toward the inner side of the reflection surface. The first peripheral gas supply port may supply gas, when viewed along the focal line, in an inclined direction inclined to a tangential direction side of the peripheral portion at the peripheral portion where the first peripheral gas supply port is located with respect to a first straight line passing through the first peripheral gas supply port and the focal line.
    Type: Application
    Filed: January 22, 2021
    Publication date: September 23, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Takayuki OSANAI, Atsushi UEDA, Koichiro KOGE, Akihiro OHSAWA, Toshiya SHINTANI, Yoshiaki YOSHIDA, Yuki ISHIDA, Yosuke TAKADA
  • Patent number: 11126095
    Abstract: An extreme ultraviolet light generation device according to an aspect of the present disclosure includes: a chamber; a mirror configured to condense extreme ultraviolet light radiated from plasma generated by irradiating a target supplied into the chamber with a laser beam; an electromagnet disposed outside the chamber to form a magnetic field between a generation region of the plasma in the chamber and the mirror; a current inversion device configured to invert the direction of current flowing through the electromagnet; and a controller configured to control the current inversion device to invert the direction of the current when a set condition is satisfied.
    Type: Grant
    Filed: August 4, 2020
    Date of Patent: September 21, 2021
    Assignee: Gigaphoton Inc.
    Inventor: Georg Saumagne
  • Patent number: 11125613
    Abstract: An extreme ultraviolet light sensor unit according to one aspect of the present disclosure includes: a mirror configured to reflect extreme ultraviolet light; a wavelength filter configured to selectively transmit the extreme ultraviolet light reflected by the mirror; an optical sensor configured to detect the extreme ultraviolet light having transmitted through the wavelength filter; and a purge gas supply unit disposed to supply purge gas to a space between the wavelength filter and the optical sensor.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: September 21, 2021
    Assignee: Gigaphoton Inc.
    Inventor: Kotaro Miyashita
  • Publication number: 20210288459
    Abstract: A laser system includes a random phase plate in an optical path between a solid-state laser device and an excimer amplifier. Cells of a predetermined shape are periodically arranged on the plate, each cell being a minimum unit region of an irregular pattern, regions of depressions or projections in units of the cells being randomly arranged. When a traveling direction of a laser beam is a Z direction, a discharge direction is a V direction, a direction orthogonal to the V and Z directions is an H direction, an in-plane direction of the plate corresponding to the V direction is a first direction, an in-plane direction of the plate corresponding to the H direction is a second direction, lengths of the cell are d1 in the first direction and d2 in the second direction, an aspect ratio of the cell defined by d2/d1 is 1.2 or more.
    Type: Application
    Filed: June 3, 2021
    Publication date: September 16, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Yuki TAMARU, Taisuke MIURA
  • Publication number: 20210289611
    Abstract: A chamber device may include a concentrating mirror, a central gas supply port, an inner wall, an exhaust port, a recessed portion, and a lateral gas supply port. The recessed portion may be on a side lateral to the focal line and recessed outward from the inner wall when viewed from a direction perpendicular to the focal line. The lateral gas supply port is formed at the recessed portion and may supply gas toward gas supplied from the central gas supply port so that a flow direction of the gas supplied from the central gas supply port is bent from a direction along the focal line toward the exhaust port and an internal space of the recessed portion.
    Type: Application
    Filed: January 22, 2021
    Publication date: September 16, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Atsushi UEDA, Takayuki OSANAI, Koichiro KOGE
  • Patent number: 11119421
    Abstract: An extreme ultraviolet light condensation mirror includes: a substrate; a multi-layer reflective film on the substrate and configured to reflect extreme ultraviolet light having a wavelength of 13.5 nm; and a protective film on the multi-layer reflective film. The protective film includes an oxide silicon layer on the multi-layer reflective film and a titanium oxide layer on the oxide silicon layer having one surface exposed. When x represents the thickness of the titanium oxide layer, the phase of standing wave of the extreme ultraviolet light at the position of the one surface for the maximum reflectance of the extreme ultraviolet light is defined to be zero, and a direction from the one surface toward the multi-layer reflective film is defined to be negative, the position of the one surface is a position at which the phase y of standing wave satisfies the expression below. ?0.313x3+1.44x2+2.57x?51.0?y<0.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: September 14, 2021
    Assignee: Gigaphoton Inc.
    Inventor: Tomoyoshi Toida
  • Publication number: 20210252634
    Abstract: A laser processing apparatus includes a placement base on which a workpiece is placed, a beam shaping optical system that shapes laser light such that a first laser light irradiated region of a mask blocking part of the laser light has a rectangular shape having short edges and long edges, the beam shaping optical system capable of causing one of a first radiation width of the first irradiated region in the direction parallel to the short edges and a second radiation width of the first irradiated region in the direction parallel to the long edges to be fixed and causing the other to be changed, a projection optical system that projects a pattern on the mask onto the workpiece, and a mover that moves the first irradiated region at least in the direction parallel to the short edges to move a second laser light irradiated region of the workpiece.
    Type: Application
    Filed: May 4, 2021
    Publication date: August 19, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Masashi SHIMBORI, Osamu WAKABAYASHI
  • Patent number: 11092896
    Abstract: An extreme ultraviolet light generation apparatus may include: a chamber device including an internal space; a target supply unit disposed at the chamber device and configured to supply a droplet of a target substance to the internal space; a target collection unit disposed at the chamber device, communicated with the internal space through an opening provided to an inner wall of the chamber device, and configured to collect the droplet passing through the opening; a detection unit disposed at the chamber device and configured to detect the target substance accumulating in the vicinity of the opening of the inner wall; and a control unit configured to stop the target supply unit depending on a result of the detection by the detection unit.
    Type: Grant
    Filed: June 1, 2020
    Date of Patent: August 17, 2021
    Assignee: Gigaphoton Inc.
    Inventor: Yuta Takashima
  • Publication number: 20210242649
    Abstract: A laser system including: A. a laser apparatus configured to output a pulse laser beam; B. an optical pulse stretcher including a delay optical path for expanding a pulse width of the pulse laser beam; and C. a phase optical element included in the delay optical path and having a function of spatially and randomly shifting a phase of the pulse laser beam. The phase optical element includes a plurality of types of cells providing different amounts of phase shift to the pulse laser beam and arranged irregularly in any direction.
    Type: Application
    Filed: April 22, 2021
    Publication date: August 5, 2021
    Applicant: Gigaphoton Inc.
    Inventor: Takashi ONOSE
  • Patent number: 11081853
    Abstract: An optical element moving apparatus includes a first holder configured to hold a first optical element, a second holder configured to hold a second optical element and having an inclination that inclines with respect to a first direction in which the second holder approaches the first holder, a guide section configured to be capable of moving the second holder in a direction parallel to the first direction, and an elastic member disposed in a position which is located between the first holder and the second holder and through which a first plane passes, the first plane intersecting the inclination at right angles and being parallel to the first direction.
    Type: Grant
    Filed: May 4, 2020
    Date of Patent: August 3, 2021
    Assignee: Gigaphoton Inc.
    Inventors: Yoshinobu Watabe, Masahide Kato, Hiroshi Furusato
  • Patent number: 11081850
    Abstract: A gas laser apparatus may include: a laser chamber connected through a first control valve to a first laser gas supply source that supplies a first laser gas containing a halogen gas; a purification column that removes at least a part of the halogen gas and a halogen compound from at least a part of a gas exhausted from the laser chamber; a booster pump; and a controller that calculates, on a basis of a first amount of a gas supplied from the booster pump to the laser chamber, a second amount of the first laser gas that is to be supplied to the laser chamber and controls the first control valve on a basis of a result of the calculation of the second amount.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: August 3, 2021
    Assignee: Gigaphoton Inc.
    Inventors: Natsushi Suzuki, Osamu Wakabayashi, Hiroaki Tsushima, Masanori Yashiro
  • Patent number: 11079686
    Abstract: An excimer laser apparatus according to the present disclosure includes an etalon spectrometer configured to measure a fringe waveform of a laser beam; and a controller configured to obtain area of a first ratio in a spectral space obtained based on a result of the measurement by the etalon spectrometer, calculate a first spectral line width of the laser beam based on the obtained area of the first ratio, and calibrate a first spectral line width based on a correlation function representing correlation between the first spectral line width and a second spectral line width of the laser beam measured by a reference meter.
    Type: Grant
    Filed: May 11, 2020
    Date of Patent: August 3, 2021
    Assignee: Gigaphoton Inc.
    Inventors: Keisuke Ishida, Masato Moriya, Natsuhiko Kouno, Takeshi Asayama, Takashi Kusama
  • Publication number: 20210235571
    Abstract: An extreme ultraviolet light generation apparatus may include a chamber causing a target substance to be turned into plasma with laser light, a light concentrating mirror concentrating extreme ultraviolet light generated by the turning of the target substance into plasma, a gas supply unit supplying gas into the chamber, a magnetic field generation unit generating a magnetic field including a magnetic field axis that crosses a light path of the extreme ultraviolet light, a first exhaust port arranged at a position through which the magnetic field axis passes in the chamber, a second exhaust port arranged at a position opposite to the light concentrating mirror in the chamber, and a gas exhaust amount adjustment unit adjusting a ratio between an exhaust amount of first exhaust gas exhausted from the first exhaust port and an exhaust amount of second exhaust gas exhausted from the second exhaust port.
    Type: Application
    Filed: April 9, 2021
    Publication date: July 29, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Atsushi UEDA, Shinji NAGAI
  • Publication number: 20210226414
    Abstract: In a laser system according to a viewpoint of the present disclosure, a first amplifier amplifies first pulsed laser light outputted from a first semiconductor laser system into second pulsed laser light, a wavelength conversion system converts the second pulsed laser light in terms of wavelength into third pulsed laser light, and an excimer amplifier amplifies the third pulsed laser light. The first semiconductor laser system includes a first current controller that controls current flowing through a first semiconductor laser in such a way that first laser light outputted from the first semiconductor laser is caused to undergo chirping and a first semiconductor optical amplifier that amplifies the first laser light into pulsed light. The laser system includes a control section that controls the amount of chirping performed on the first pulsed laser light in such a way that excimer laser light having a target spectral linewidth is achieved.
    Type: Application
    Filed: April 1, 2021
    Publication date: July 22, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Taisuke MIURA, Osamu WAKABAYASHI, Hironori IGARASHI
  • Publication number: 20210226411
    Abstract: A laser system according to one aspect of the present disclosure includes a wavelength-variable first solid-state laser device configured to output a first pulse laser beam; a wavelength conversion system including a first nonlinear crystal configured to wavelength-convert the first pulse laser beam and a first rotation stage configured to change a first incident angle of the first pulse laser beam on the first nonlinear crystal; an excimer amplifier configured to amplify a pulse laser beam wavelength-converted by the wavelength conversion system; and a control unit configured to receive, from an external device, data of a target center wavelength of an excimer laser beam output from the excimer amplifier, control a wavelength of the first pulse laser beam in accordance with the instructed target center wavelength, and control the first incident angle on the first nonlinear crystal in accordance with an average value of the target center wavelength.
    Type: Application
    Filed: April 2, 2021
    Publication date: July 22, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Taisuke MIURA, Takashi ONOSE, Osamu WAKABAYASHI
  • Patent number: 11067907
    Abstract: A target supply device includes a vibrating element driven by a square wave electric signal and configured to generate a droplet of a target substance by vibrating the target substance to be output from a nozzle through a vibration propagating path; a temperature adjusting mechanism configured to adjust, to a specified temperature, a temperature of a vibration propagating path member including at least part of the vibration propagating path; a droplet detecting unit configured to output a signal containing information on a droplet detection interval indicating a time interval of droplets continuously generated; and a control unit configured to determine, based on the droplet detection interval, an operation specified temperature that is the specified temperature of the vibration propagating path member and an operation duty value that is a duty value of the electric signal used for driving the vibrating element when the droplet is irradiated with the laser beam.
    Type: Grant
    Filed: August 7, 2020
    Date of Patent: July 20, 2021
    Assignee: Gigaphoton Inc.
    Inventors: Masaki Nakano, Fumio Iwamoto