Abstract: A machine learning method includes acquiring image data generated from reflected light of illumination light radiated to a first region of a semiconductor film on a substrate, the first region annealed by pulse laser light, acquiring data on a measured semiconductor property of the first region, generating training data including the image data as input and the measured data as output associated with each other, and performing machine learning using a neural network based on the training data to generate a learned model.

Abstract: A laser chamber includes a container configured to be filled with a laser gas, a first electrode arranged in the container, a second electrode arranged at a position closer to an inner wall of the container than the first electrode while facing the first electrode, and a preionization device arranged on at least one lateral side of the first electrode. Here, the preionization device includes a dielectric pipe, a preionization inner electrode arranged in the dielectric pipe, a preionization outer electrode arranged in contact with outside of the dielectric pipe, an electrically insulating tube inserted between the dielectric pipe and the preionization inner electrode at an end part of the dielectric pipe in a longitudinal direction, and an electrically insulating fixing base that fixes the dielectric pipe at the end part of the dielectric pipe in the longitudinal direction and makes point contact with the dielectric pipe.

Abstract: A beam steering device includes a first mirror configured to reflect, in a second direction, laser light incident thereon in a first direction; a second mirror configured to reflect, in a third direction, the laser light reflected by the first mirror; a first stage configured to integrally move the first mirror and the second mirror in a direction parallel to the first direction; a second stage arranged on the first stage and configured to move the second mirror in a direction parallel to the second direction; and a holder arranged on the second stage and configured to adjust an orientation of a reflection surface of the second mirror.

Abstract: A gas laser device includes a chamber device outputting pulse laser light, a pulse stretcher including looped optical paths, and a housing including a main body portion in which an opening is formed. Each of the looped optical paths includes a beam splitter, and a plurality of circulation mirrors sequentially reflecting a part of the pulse laser light incident on the beam splitter and returning the part of the pulse laser light to the beam splitter to be superimposed on another part thereof. The pulse stretcher includes a plurality of units each including two or more optical elements and being able to be individually taken in and out through the opening. The plurality of units includes first and second units. A deterioration speed of at least one optical element of the first unit is higher than a deterioration speed of the optical elements of the second unit.

Abstract: A gas laser device includes a chamber device configured to output pulse laser light, and a pulse stretcher including a plurality of looped optical paths configured to extend a pulse width of the pulse laser light. Each of the looped optical paths includes a beam splitter on which the pulse laser light is incident and a plurality of orbit mirrors configured to sequentially reflect a part of the pulse laser light incident on the beam splitter and return the part of the pulse laser light to the beam splitter so as to be superimposed on another part of the pulse laser light. The pulse stretcher includes a unit that is detachable as separating two or more of the beam splitters from one or more of the orbit mirrors.

Abstract: A pulse width extension device includes a beam splitter configured to split pulse laser light into loop light and through light and superimpose the loop light circulated through a loop optical path at least once on the through light, and a plurality of concave mirrors configuring the loop optical path. A total number of the concave mirrors is 4n, where n is an integer equal to or more than 1. A first concave mirror on which the loop light is incident firstly from the beam splitter and a second concave mirror on which the loop light is incident thirdly or in a 4n-1-th order from the beam splitter, among the plurality of concave mirrors, are arranged such that an angle of a reflection surface of each of the first concave mirror and the second concave mirror is capable of being adjusted with a position thereof fixed.

Abstract: An electronic device manufacturing method includes acquiring a pulse spectral shape of pulse laser light, and a target integrated spectral shape realized by the pulse laser light of pulses generated based on wavelength sequence in which a center wavelength of the pulse laser light periodically changes; calculating target center wavelengths allocated to the pulses to realize the target integrated spectral shape, and a number of allocation pulses of each target center wavelength being the number of allocation pulses per cycle of the wavelength sequence; calculating the wavelength sequence by correspondingly allocating at least one first center wavelength having the number of allocation pulses of 2 or greater so that the smaller the number of allocation pulses is, the larger a time interval of the allocation pulses for the first center wavelength is, and then correspondingly allocating at least one second center wavelength having the number of allocation pulses of 1.

Abstract: An extreme ultraviolet light generation system includes a chamber, a target supply unit supplying a target substance to a plasma generation region including a first point in the chamber, a window allowing pulse laser light with which the target substance is irradiated to pass therethrough, an EUV light concentrating mirror concentrating extreme ultraviolet light generated at the first point on a second point, a planar mirror arranged on an optical path of the extreme ultraviolet light reflected by the EUV light concentrating mirror and between the first and second points, an actuator causing the second point to be switched between a first position and a second position, a connection portion connectable to an external apparatus, a first EUV measurement unit on which the extreme ultraviolet light having passed through the second position is incident, and a processor controlling the actuator based on a signal from the external apparatus.

Abstract: An extreme ultraviolet light generation system includes a chamber including a first region; a target supply unit supplying a target to the first region; a laser device outputting pulse laser light; an optical system including an optical element to guide the pulse laser light to the first region; an irradiation position adjustment mechanism adjusting a laser irradiation position; an EUV light concentrating mirror arranged such that the pulse laser light passes outside the EUV light concentrating mirror and is guided to the first region; a plurality of EUV sensors measuring radiation energies of the EUV light radiated from the first region in mutually different radiation directions, and having a geometric centroid located at a position away from the optical axis in a direction toward the EUV light concentrating mirror; and a processor controlling the irradiation position adjustment mechanism as setting a target irradiation position of the pulse laser light.

Abstract: An optical pulse stretcher that stretches a pulse width of a pulse laser beam includes a polarizer configured to separate a component in a specific polarization direction of the pulse laser beam that has entered, a delay optical system including a plurality of mirrors through which the pulse laser beam reflected by or transmitted through the polarizer is propagated; and a first Faraday rotator that includes a first magnet and a first Faraday material and is disposed on an optical path of the delay optical system to rotate a polarization direction of the pulse laser beam.

Abstract: An ultraviolet laser device includes an oscillation stage laser outputting linearly polarized pulse laser light having an ultraviolet wavelength, an optical isolator arranged on an optical path between the oscillation stage laser and an amplifier, and a processor. The optical isolator includes a first polarizer, a first Faraday rotator rotating a polarization direction of the pulse laser light transmitted through the first polarizer in a first rotation direction, a second polarizer arranged so that the pulse laser light output from the first Faraday rotator is transmitted therethrough, a first actuator relatively moving the first magnet and the first Faraday material in an optical axis direction, and a first sensor measuring a power of pulse laser light reflected by the second polarizer among the pulse laser light output from the oscillation stage laser. The processor controls the first actuator based on a measurement result of the first sensor.

Abstract: A chamber apparatus for a laser includes a chamber, a first optical path tube, a window, a resonance vessel, and a nozzle tube. In the chamber, a pair of discharge electrodes are disposed. The first optical path tube communicates with the chamber. The window is configured such that light is incident thereon from a region between the discharge electrodes via an interior of the first optical path tube. The nozzle tube is configured to cause the interior of the first optical path tube to communicate with the resonance vessel.

Abstract: A laser apparatus includes a first optical element, a second optical element, a first actuator configured to change a first wavelength component included in a pulse laser beam by changing a posture of the first optical element, a second actuator configured to change a second wavelength component included in the pulse laser beam by changing a posture of the second optical element, a first encoder configured to measure a position of the first actuator, a second encoder configured to measure a position of the second actuator, and a processor. The processor reads a first relation and a second relation and performs control of the first actuator based on the first relation and the position of the first actuator measured by the first encoder and control of the second actuator based on the second relation and the position of the second actuator measured by the second encoder.

Abstract: A laser apparatus according to an aspect of the present disclosure includes: an optical isolator disposed in an optical path between an oscillation-stage laser and an amplification-stage laser configured to amplify, as seed light, linearly polarized pulse laser light output from the oscillation-stage laser and having an ultraviolet wavelength, the optical isolator including a first Faraday rotator configured to rotate a polarization direction of the pulse laser light output from the oscillation-stage laser by a first angle in a first rotation direction by a magnetic field in a first direction, a first polarizer having normalized transmittance greater than or equal to 0.

Abstract: An electric component box includes a first box into which a wiring from the extreme ultraviolet light generation chamber device is introduced and capable of being fixed to a placement surface; a second box into which a wiring from the first box is introduced and capable of being switched, by being raised and lowered, between a fixed state and a movable state; and a connection device providing connection as allowing the second box to be rotatable with respect to the first box, from a facing state in which a predetermined side wall of the first box and a predetermined side wall of the second box face each other, in a direction in which the predetermined side wall of the first box and the predetermined side wall of the second box move away from each other, and to be capable of being raised and lowered with respect to the first box.

Abstract: A laser processing apparatus includes a placement base on which a workpiece is placed, a beam shaping optical system configured to shape laser light in such a way that a laser light irradiated region of a mask configured to block part of the laser light has a rectangular shape having short edges and long edges, a second radiation width of the irradiated region in the direction parallel to the long edges being changeable independently of a first radiation width of the irradiated region in the direction parallel to the short edges, and the irradiated region being movable in the direction parallel to the long edges, a projection optical system configured to project a pattern of the mask on the workpiece placed on the placement base, and a mover configured to be capable of moving the irradiated region in the direction parallel to the short edges.

Abstract: A training data creation method according to an aspect of the present disclosure is used for machine learning of a learning model for predicting lifetime of a consumable of a laser device. The method includes acquiring first lifetime-related information including data of at least one lifetime-related parameter of the consumable recorded in association with each of numbers of oscillation pulses during a period from start of use to replacement of the consumable, determining a first deterioration degree of the consumable based on the number of oscillation pulses, determining a second deterioration degree of the consumable based on the at least one lifetime-related parameter, determining a third deterioration degree of the consumable based on the first deterioration degree and the second deterioration degree, and creating training data in which the first lifetime-related information and the third deterioration degree are associated with each other.

Abstract: A laser chamber includes a container configured to accommodate a laser gas; a pair of discharge electrodes; a fan configured to cause the laser gas to circulate; a first guide including a first surface and a second surface, the first surface being configured to guide the laser gas therealong, and the second surface and an inner surface of the container forming a first space that narrows in a first direction toward depth; and a second guide including a third surface configured to guide the laser gas therealong toward a vicinity of the first guide.

Abstract: An alignment adjuster includes a first holder made of a first material and configured to support an optical element, a first adjuster including a first expandable/contractable section made of a second material different from the first material and configured to rotate the first holder and the optical element around a first axis by adjusting the length of the first expandable/contractable section with the first expandable/contractable section being in contact with the first holder, and a first support member made of the second material and configured to support the first adjuster, and the first adjuster is configured to be capable of adjusting the position where the first expandable/contractable section and the first holder are in contact with each other to be located in a first plane containing a first end section of the first support member and the first axis.

Abstract: A laser apparatus according to an aspect of the present disclosure includes a laser oscillator configured to emit a pulse laser beam, and a first optical pulse stretcher, a second optical pulse stretcher, and a third optical pulse stretcher that are disposed on an optical path of the pulse laser beam. When L1 represents an optical path length of a delay optical path of the first optical pulse stretcher, L2 represents an optical path length of a delay optical path of the second optical pulse stretcher, L3 represents an optical path length of a delay optical path of the third optical pulse stretcher, and n represents an integer equal to or larger than two, L2 is an integral multiple of L1 by an integer equal to or larger than two and L3 satisfies the following condition: (n?0.75)×L1?L3?(n?0.25)×L1.