Abstract: The present invention relates to a spark discharge generator. The spark discharge system of the present invention includes a plurality of columnar electrodes and a ground plate having a plurality of outlet holes at positions corresponding to the columnar electrodes. The use of the spark discharge generator enables the production of a three-dimensionally shaped nanostructure array on a large area in a uniform and rapid manner.
Type:
Grant
Filed:
December 19, 2013
Date of Patent:
June 6, 2017
Assignees:
Global Frontier Center—Multiscale Energy Systems, SNU R&DB Foundation
Inventors:
Man Soo Choi, Kyungyeon Ha, Hoseop Choi, Kyuhee Han, Kinam Jung, Dongjoon Lee, Sukbyung Chae