Abstract: A power semiconductor device includes a silicon carbide substrate and at least a first layer or region formed above the substrate. The silicon carbide substrate has a pattern of pits formed thereon. The device includes a stop layer that is disposed at least in part laterally between the pits. The device further comprising an ohmic metal disposed at least in the pits to form low-resistance ohmic contacts, wherein the ohmic metal contacts at least parts of the stop layer.
Type:
Grant
Filed:
December 5, 2019
Date of Patent:
December 29, 2020
Assignees:
Purdue Research Foundation, GLOBAL POWER TECHNOLOGIES GROUP
Abstract: A power semiconductor device includes a silicon carbide substrate and at least a first layer or region formed above the substrate. The silicon carbide substrate has a pattern of pits formed thereon. The device further comprising an ohmic metal disposed at least in the pits to form low-resistance ohmic contacts.
Type:
Grant
Filed:
October 2, 2017
Date of Patent:
December 10, 2019
Assignees:
Purdue Research Foundation, GLOBAL POWER TECHNOLOGIES GROUP