Patents Assigned to GLOBALFOUNDIRES, INC.
  • Patent number: 9659785
    Abstract: A method of making a semiconductor device includes patterning a fin in a substrate; performing a first etching process to remove a portion of the fin to cut the fin into a first cut fin and a second cut fin, the first cut fin having a first fin end and a second fin end and the second cut fin having a first fin end and a second fin end; forming an oxide layer along an endwall of the first fin end and an endwall of the second fin end of the first cut fin, and an endwall of the first fin end and an endwall of the second fin end of the second cut fin; disposing a liner onto the oxide layer disposed onto the endwall of the first fin end of the first cut fin to form a bilayer liner; and performing a second etching process to remove a portion of the second cut fin.
    Type: Grant
    Filed: September 1, 2015
    Date of Patent: May 23, 2017
    Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, GLOBALFOUNDIRES INC.
    Inventors: Kangguo Cheng, Ruilong Xie, Tenko Yamashita
  • Patent number: 9324631
    Abstract: A bump structure or pillar structure formed above a metallization system of a complex semiconductor device may include a stress buffer layer, which may efficiently distribute the resulting mechanical stress which may typically occur during the chip package interaction due to a thermal mismatch of these components. The stress buffer layer comprises copper-based buffer regions that cover a significant portion of the overall surface, wherein a thickness of approximately 3-10 ?m may also be used. Moreover, the buffer regions may efficiently replace aluminum as a terminal metal active region.
    Type: Grant
    Filed: April 25, 2013
    Date of Patent: April 26, 2016
    Assignee: GLOBALFOUNDIRES Inc.
    Inventors: Axel Walter, Matthias Lehr
  • Patent number: 9236479
    Abstract: One method disclosed includes, among other things, removing a sacrificial gate structure to thereby define a replacement gate cavity, performing an etching process through the replacement gate cavity to define a fin structure in a layer of semiconductor material using a patterned hard mask exposed within the replacement gate cavity as an etch mask and forming a replacement gate structure in the replacement gate cavity around at least a portion of the fin structure.
    Type: Grant
    Filed: May 11, 2015
    Date of Patent: January 12, 2016
    Assignee: GLOBALFOUNDIRES Inc.
    Inventors: Ruilong Xie, Ajey Poovannummoottil Jacob
  • Patent number: 9166588
    Abstract: A Physical Unclonable Function (PUF) semiconductor device includes a semiconductor substrate, and a well formed in the semiconductor substrate. The well includes a first region having a first concentration of ions, and at least one second region having a second concentration that is less than the first concentration. First and second FETs are formed on the well. The first and second FETs have a voltage threshold mismatch with respect to one another based on the first region and the at least one second region.
    Type: Grant
    Filed: January 20, 2014
    Date of Patent: October 20, 2015
    Assignee: GLOBALFOUNDIRES INC.
    Inventors: Kai D. Feng, Wai-Kin Li, Ping-Chuan Wang, Zhijian J. Yang
  • Patent number: 9159610
    Abstract: A method for fabricating an integrated circuit includes providing a conductive material overlying a semiconductor substrate and a dielectric material overlying the conductive material, wherein an opening exposes a surface of the conductive material and sidewalls of the dielectric material and selectively depositing a first layer of a first barrier material on the surface of the conductive material with the sidewalls of the dielectric material remaining exposed, the first barrier material being such that, if annealed in an annealing process, the first barrier material would diffuse into the conductive material. The method further includes modifying the first barrier material on the exposed surface to form a second barrier material, the second barrier material being such that, during an annealing process, the second barrier material does not diffuse into the conductive material and depositing a second layer of the first barrier material along the sidewalls of the opening.
    Type: Grant
    Filed: October 23, 2013
    Date of Patent: October 13, 2015
    Assignee: GLOBALFOUNDIRES, INC.
    Inventors: Xunyuan Zhang, Moosung Chae, Larry Zhao