Patents Assigned to GlobalWafters Co., Ltd.
  • Semiconductor wafer support ring for heat treatment
    Patent number: 10458709
    Abstract: A support ring for supporting a semiconductor wafer in a boat of a vertical furnace used in processing of the semiconductor wafer includes a semicircular segment. The semicircular segment has an upper surface, a lower surface opposite the upper surface, a radial inner wall defining an inner radius, and a radial outer wall defining an outer radius. The support ring further includes protrusions in the upper surface of the semicircular segment. The protrusions extend above the upper surface.
    Type: Grant
    Filed: June 1, 2018
    Date of Patent: October 29, 2019
    Assignee: GlobalWafters Co., Ltd.
    Inventors: Qingmin Liu, William Lynn Luter, Shawn George Thomas